Investigation of the limitations of the motion estimation algorithms for measuring mems in-plane vibrations

Abstract

Stroboscopic Illumination is a technique used for in-plane vibration measurements for MEMS devices. An easy to implement and cost efficient method for motion estimation is using sub-pixel image processing algorithms with stroboscopic illumination. This paper investigates the limitations and accuracy range of different image processing algorithms for the measurement of in-plane vibration of MEMS devices. The performance of such algorithms is investigated for various experimental variables and the optimum conditions are studied for obtaining accurate results.