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Investigation of the limitations of the motion estimation algorithms for measuring mems in-plane vibrations

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dc.contributor.departmentDepartment of Mechanical Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorBaşdoğan, İpek
dc.contributor.kuauthorBüyükyazı, Tolga
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T22:53:39Z
dc.date.issued2007
dc.description.abstractStroboscopic Illumination is a technique used for in-plane vibration measurements for MEMS devices. An easy to implement and cost efficient method for motion estimation is using sub-pixel image processing algorithms with stroboscopic illumination. This paper investigates the limitations and accuracy range of different image processing algorithms for the measurement of in-plane vibration of MEMS devices. The performance of such algorithms is investigated for various experimental variables and the optimum conditions are studied for obtaining accurate results.
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.volume4
dc.identifier.isbn1420-0634-21
dc.identifier.isbn9781-4200-6342-4
dc.identifier.isbn1420-0637-66
dc.identifier.isbn9781-4200-6376-9
dc.identifier.linkhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-34548016336andpartnerID=40andmd5=6da2cc0a8c29a2e0765631694e171dd9
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-34548016336
dc.identifier.urihttps://hdl.handle.net/20.500.14288/7234
dc.keywordsStroboscopic illumination Algorithms
dc.keywordsCost effectiveness
dc.keywordsMEMS
dc.keywordsVibrations (mechanical)
dc.keywordsImage processing algorithms
dc.keywordsIn-plane vibrations
dc.keywordsStroboscopic illumination
dc.keywordsMotion estimation
dc.language.isoeng
dc.publisherNSTI
dc.relation.ispartof2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings
dc.subjectMechanical engineering
dc.titleInvestigation of the limitations of the motion estimation algorithms for measuring mems in-plane vibrations
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorBaşdoğan, İpek
local.contributor.kuauthorBüyükyazı, Tolga
local.publication.orgunit1College of Engineering
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit2Department of Mechanical Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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