Publication:
Uncooled thermo-mechanical detector array with optical readout

Placeholder

School / College / Institute

Organizational Unit

Program

KU Authors

Co-Authors

N/A

Publication Date

Language

Embargo Status

Journal Title

Journal ISSN

Volume Title

Alternative Title

Abstract

This paper reports a novel uncooled infrared FPA whose performance is comparable to the cooled FPA's in terms of noise parameters. FPA consists of bimaterial microcantilever structures that are designed to convert IR radiation energy into mechanical energy. Induced deflection by mechanical energy is detected by means of optical methods that measure sub nanometer thermally induced deflections. Analytical solutions are developed for calculating the figure of merits for the FPA. FEM simulations and the analytical solution agree well. Calculations show that for an FPA, NETD of < 5 mK is achievable in the 8-12 pm band. The design and optimization for the detectors are presented. The mechanical structure of pixels is designed such that it can be possible to form large array size FPA's. Microfabrication of the devices to improve the performance further; employs low cost standard MEMS processes.

Source

Publisher

Walter De Gruyter Gmbh

Subject

Engineering, Electrical and electronic engineering, Optics, Physics, Applied physics

Citation

Has Part

Source

Opto-Electronics Review

Book Series Title

Edition

DOI

item.page.datauri

Link

Rights

Copyrights Note

Endorsement

Review

Supplemented By

Referenced By

0

Views

0

Downloads