Publication:
Optical readout methods for mems cantilever based sensors

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Program

Electrical and Electronics Engineering

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Authors

Adiyan, Ulaş

Advisor

Ürey, Hakan

Publication Date

2016

Language

English

Type

Dissertation

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Abstract

Description

xxv, 182 leaves : illustrations ; 30 cm.

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Publisher:

Koç University

Keywords:

Subject

Optical MEMS, Integrated optics, Optoelectronic devices, AC-coupled optical readout, MEMS cantilever sensor arrays, Thermo-mechanical IR detectors, Bimaterial cantilevers, Diffraction grating

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