Publication: Optical readout methods for mems cantilever based sensors
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Program
Electrical and Electronics Engineering
KU-Authors
KU Authors
Co-Authors
Authors
Adiyan, Ulaş
Advisor
Ürey, Hakan
Publication Date
Language
English
Type
Journal Title
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Volume Title
Abstract
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Publisher:
Koç University
Keywords:
Subject
Optical MEMS, Integrated optics, Optoelectronic devices, AC-coupled optical readout, MEMS cantilever sensor arrays, Thermo-mechanical IR detectors, Bimaterial cantilevers, Diffraction grating