Publication: Optical readout methods for mems cantilever based sensors
Files
Program
Electrical and Electronics Engineering
KU-Authors
KU Authors
Co-Authors
Authors
Advisor
YÖK Thesis ID
Approval Date
Publication Date
Language
Type
Embargo Status
Journal Title
Journal ISSN
Volume Title
Alternative Title
Abstract
Source
Publisher
Koç University
Subject
Optical MEMS, Integrated optics, Optoelectronic devices, AC-coupled optical readout, MEMS cantilever sensor arrays, Thermo-mechanical IR detectors, Bimaterial cantilevers, Diffraction grating
Citation
Has Part
Source
Book Series Title
Edition
DOI
item.page.datauri
Link
Rights
restrictedAccess
Copyrights Note
© All Rights Reserved. Accessible to Koç University Affiliated Users Only!