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Optical readout methods for mems cantilever based sensors

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dc.contributor.advisorÜrey, Hakan
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorAdiyan, Ulaş
dc.contributor.programElectrical and Electronics Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.coverage.spatialİstanbul
dc.date.accessioned2024-11-09T21:54:05Z
dc.date.issued2016
dc.format.extentxxv, 182 leaves : illustrations ; 30 cm.
dc.identifier.urihttps://hdl.handle.net/20.500.14288/4319
dc.keywordsPrism-based method
dc.keywordsNon-linear optical readout
dc.keywordsClosed-loop dynamic operation
dc.language.isoeng
dc.publisherKoç University
dc.relation.collectionKU Theses and Dissertations
dc.rightsrestrictedAccess
dc.rights.copyrightsnote© All Rights Reserved. Accessible to Koç University Affiliated Users Only!
dc.subjectOptical MEMS
dc.subjectIntegrated optics
dc.subjectOptoelectronic devices
dc.subjectAC-coupled optical readout
dc.subjectMEMS cantilever sensor arrays
dc.subjectThermo-mechanical IR detectors
dc.subjectBimaterial cantilevers
dc.subjectDiffraction grating
dc.titleOptical readout methods for mems cantilever based sensors
dc.typeDissertation
dspace.entity.typePublication
local.contributor.kuauthorAdiyan, Ulaş
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