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Interferometric methods for static and dynamic characterizations of micromembranes for sensing functions

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dc.contributor.coauthorSalbut, Leszek
dc.contributor.coauthorKacperski, Jacek
dc.contributor.coauthorStyk, Adam R.
dc.contributor.coauthorJozwik, Michal
dc.contributor.coauthorGorecki, Christophe
dc.contributor.coauthorJacobelli, Alain
dc.contributor.coauthorDean, Thierry
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.date.accessioned2024-11-09T13:44:55Z
dc.date.issued2004
dc.description.abstractWe present a methodology for static and dynamic testing of mechanical properties of microelements. The measurement path includes temporal phase shifting interferometry for quantitative static shape elements analysis. This is followed by determination of the resonance frequency by means of modified time average interferometry and transient amplitude and phase maps of vibrating micromembrane capturing and evaluation by phase shifting stroboscopic interferometry. Proper application of combination of these methods allows for quick and accurate analysis of micromembranes and optimization of their manufacturing conditions.
dc.description.fulltextYES
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipN/A
dc.description.versionPublisher version
dc.identifier.doi10.1117/12.545574
dc.identifier.embargoNO
dc.identifier.filenameinventorynoIR01007
dc.identifier.issn0277-786X
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-10044223311
dc.identifier.urihttps://doi.org/10.1117/12.545574
dc.identifier.wos229688000014
dc.keywordsMEMS/MOEMS
dc.keywordsMicroelements
dc.keywordsMicrointerferometry
dc.keywordsOptical metrology
dc.keywordsVibration analysis
dc.language.isoeng
dc.publisherSociety of Photo-optical Instrumentation Engineers (SPIE)
dc.relation.ispartofProceedings of SPIE - The International Society for Optical Engineering
dc.relation.urihttp://cdm21054.contentdm.oclc.org/cdm/ref/collection/IR/id/1015
dc.subjectElectrical and electronic engineering
dc.subjectOptics
dc.titleInterferometric methods for static and dynamic characterizations of micromembranes for sensing functions
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isParentOrgUnitOfPublication8e756b23-2d4a-4ce8-b1b3-62c794a8c164
relation.isParentOrgUnitOfPublication.latestForDiscovery8e756b23-2d4a-4ce8-b1b3-62c794a8c164

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