Publication: FR-4 as a new MOEMS platform
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Abstract
FR4 is a well-engineered material and widely used in the PCB industry and lend itself to high degree of integration of optoelectronic, micro-optic, and electronic devices. FR4 is used for the first time as an actuated mechanical device that integrates several functions on the same device. Two different approaches to 2D laser scanning using a single electromagnetic actuation coil and application to Fourier Transform spectroscopy are presented; many other applications can be envisioned.
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Institute of Electrical and Electronics Engineers
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2007 IEEE/Leos International Conference On Optical Mems And Nanophotonics
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10.1109/OMEMS.2007.4373822
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