Publication: A Fourier transform spectrometer using resonant vertical comb actuators
Program
KU-Authors
KU Authors
Co-Authors
Wolter, Alexander
Publication Date
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Type
Embargo Status
Journal Title
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Alternative Title
Abstract
The design, fabrication and characterization of a novel out-of-plane vertical comb-drive actuator based lamellar grating interferometer (LGI) is reported. The interferometer utilizes resonant mode vertical comb actuators, where comb fingers are simultaneously used for actuation and as a movable diffraction grating, making the device very compact. The Fourier transform of the zeroth order intensity pattern as a function of the optical path difference gives the spectrum of light. The main advantages offered by the proposed device are a long travel range (i.e. good spectral resolution), a large clear aperture (i.e. high light efficiency), and a very simple, robust and compact spectrometer structure. Peak-to-peak 106 mu m out-of-plane deflection is observed in ambient pressure and at 28 V, corresponding to a theoretical spectral resolution of about 0.4 nm in the visible band and 3.6 nm at 1.5 mu m. A simple CMOS compatible process based on bulk micromachining of a silicon-on-insulator wafer is used for the device fabrication.
Source
Publisher
Institute of Physics (IOP) Publishing
Subject
Engineering, Electrical electronic engineering, Nanoscience, Nanotechnology, Instruments, Instrumentation, Physics, Applied physics
Citation
Has Part
Source
Journal of Micromechanics and Microengineering
Book Series Title
Edition
DOI
10.1088/0960-1317/16/12/001