Design and fabrication of a P(VDF - TrFE) based piezoelectric micromachined ultrasonic transducer with acoustic cavity

Abstract

Although piezoelectric micromachined ultrasonic transducers (pMUTs) are of great interest for various applications, the current fabrication complexity and acoustic performance of such devices could limit their performance. Especially for applications involving low voltage electronics, improving the bandwidths of piezoelectric micromachined ultrasonic transducers is an important step. Here, we present a novel pMUT design with an acoustic cavity and its simple fabrication strategy. Our approach not only improves the bandwidth compared to conventional pMUTs but also eliminates complex fabrication steps.