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Design and fabrication of a P(VDF - TrFE) based piezoelectric micromachined ultrasonic transducer with acoustic cavity

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dc.contributor.coauthorPala, Sedat
dc.contributor.departmentDepartment of Mechanical Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.departmentn2STAR (Koç University Nanofabrication and Nanocharacterization Center for Scientifc and Technological Advanced Research)
dc.contributor.kuauthorAkıncı, Seçkin
dc.contributor.kuauthorBathaei, Mohammad Javad
dc.contributor.kuauthorBeker, Levent
dc.contributor.kuauthorToymus, Alp Timuçin
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.contributor.schoolcollegeinstituteResearch Center
dc.date.accessioned2024-11-09T23:49:00Z
dc.date.issued2022
dc.description.abstractAlthough piezoelectric micromachined ultrasonic transducers (pMUTs) are of great interest for various applications, the current fabrication complexity and acoustic performance of such devices could limit their performance. Especially for applications involving low voltage electronics, improving the bandwidths of piezoelectric micromachined ultrasonic transducers is an important step. Here, we present a novel pMUT design with an acoustic cavity and its simple fabrication strategy. Our approach not only improves the bandwidth compared to conventional pMUTs but also eliminates complex fabrication steps.
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessNO
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipScientific and Technological Research Council of Turkey (TUBITAK) The authors acknowledge the contributions of Nanofabrication and Nanocharacterization Center for Scientific and Technological Advanced Research researchers. This work was supported by Scientific and Technological Research Council of Turkey (TUBITAK).
dc.identifier.doi10.1109/IUS54386.2022.9957926
dc.identifier.isbn978-1-6654-6657-8
dc.identifier.issn1948-5719
dc.identifier.scopus2-s2.0-85143766517
dc.identifier.urihttps://doi.org/10.1109/IUS54386.2022.9957926
dc.identifier.urihttps://hdl.handle.net/20.500.14288/14278
dc.identifier.wos896080400257
dc.keywordsPiezoelectric micromachined ultrasonic transducer (pMUT)
dc.keywordsFree boundary
dc.keywordsAcoustic resonator
dc.keywordsHelmholtz resonance
dc.keywordsAcoustic cavity
dc.keywordsDouble resonance
dc.language.isoeng
dc.publisherIeee
dc.relation.ispartof2022 Ieee International Ultrasonics Symposium (Ieee Ius)
dc.subjectAcoustics
dc.subjectElectrical electronic engineering
dc.titleDesign and fabrication of a P(VDF - TrFE) based piezoelectric micromachined ultrasonic transducer with acoustic cavity
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorToymus, Alp Timuçin
local.contributor.kuauthorBathaei, Mohammad Javad
local.contributor.kuauthorAkıncı, Seçkin
local.contributor.kuauthorBeker, Levent
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit1College of Engineering
local.publication.orgunit1Research Center
local.publication.orgunit2Department of Mechanical Engineering
local.publication.orgunit2n2STAR (Koç University Nanofabrication and Nanocharacterization Center for Scientifc and Technological Advanced Research)
local.publication.orgunit2Graduate School of Sciences and Engineering
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