Publication:
MEMS scanners for display, imaging, and spectroscopy and their dynamic characterization

dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorSeren, Hüseyin Rahmi
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T12:15:34Z
dc.date.issued2010
dc.description.abstractMoving micro-mechanical structures combined with laser light sources and micro-optics enable a number of powerful applications in display, imaging, and spectroscopy. Examples of systems developed in our laboratory are: rotational scanners developed for micro-projectors, dynamic diffraction gratings with large out-of-plane motion developed for Fourier Transform spectrometers, and 2 degree-of-freedom MEMS stages that carry micro-lens arrays for laser beam steering and imaging applications. Precise control of motion is critical in all those applications. We developed a number of optical characterization tools for point-based and full-field dynamic characterization of micro and nano mechanical structures. In this paper, we first briefly discuss the applications and then describe the details of the optical characterization tools. First setup is a stroboscopic interferometry for dynamic deformation analysis. Second setup is a simple technique for simultaneous in-plane and out-of-plane measurement with nanometric precision. The setup is constructed using one photo detector and a Mirau-type interference objective. For out-of-plane measurements, interference fringes are used to compute the the deflection amount. For in-plane measurements, knife edge technique is used to modulate the reflected beam intensity using a sharp edge in the object. Third setup is a simple optical angle sensor for rotational mirrors, which uses only one bi-cell photo detector. The setup is able to measure amplitude, phase, and quality factor of torsional devices.
dc.description.fulltextYES
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuEU - TÜBİTAK
dc.description.sponsorshipScientific and Technological Research Council of Turkey (TÜBİTAK)
dc.description.sponsorshipMicrovision Inc., USA
dc.description.sponsorshipEuropean Union (European Union)
dc.description.sponsorshipHorizon 2020
dc.description.sponsorshipEuropean Research Council (ERC)
dc.description.sponsorshipFP7 MEMFIS
dc.description.sponsorshipTurkish Academy of Sciences (TÜBA)-GEBIP
dc.description.versionPublisher version
dc.identifier.doi10.1117/12.851777
dc.identifier.embargoNO
dc.identifier.filenameinventorynoIR00931
dc.identifier.isbn978-0-8194-7912-9
dc.identifier.issn0277-786X
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-79958120428
dc.identifier.urihttps://doi.org/10.1117/12.851777
dc.identifier.wos285572800059
dc.keywordsMEMS
dc.keywordsActuators
dc.keywordsImaging
dc.keywordsDisplay
dc.keywordsMEMS characterization
dc.language.isoeng
dc.publisherSociety of Photo-optical Instrumentation Engineers (SPIE)
dc.relation.grantno1.06E+70
dc.relation.ispartof2010 Fourth International Conference on Experimental Mechanics
dc.relation.urihttp://cdm21054.contentdm.oclc.org/cdm/ref/collection/IR/id/942
dc.subjectComputer science
dc.subjectMechanics
dc.subjectOptics
dc.titleMEMS scanners for display, imaging, and spectroscopy and their dynamic characterization
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorSeren, Hüseyin Rahmi
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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