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MEMS stage integrated with microlens arrays for high-resolution beam steering

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dc.contributor.coauthorHibert, Cyrille
dc.contributor.coauthorSeren, Hüseyin R.
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorArslan, Aslıhan
dc.contributor.kuauthorAtaman, Çağlar
dc.contributor.kuauthorGökçe, Sertan Kutal
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.date.accessioned2024-11-09T12:29:09Z
dc.date.issued2009
dc.description.abstractA novel micromechanical stage with a uniaxial set of combfingers capable of 2D actuation is designed and developed. Driven at resonance the stage deflects up to 108 mu m out-of-plane and 102 mu m in-plane, with 140V and 94V peak-to-peak actuation voltage, respectively.
dc.description.fulltextYES
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuTÜBİTAK
dc.description.sponsorshipScientific and Technological Research Council of Turkey (TÜBİTAK)
dc.description.versionPublisher version
dc.identifier.doi10.1016/j.proche.2009.07.329
dc.identifier.embargoNO
dc.identifier.filenameinventorynoIR00836
dc.identifier.issn1876-6196
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-71549140937
dc.identifier.urihttps://doi.org/10.1016/j.proche.2009.07.329
dc.identifier.wos275995600112
dc.keywordsHybrid integration
dc.keywordsComb drive
dc.keywordsBeam steering
dc.language.isoeng
dc.publisherElsevier
dc.relation.grantno1.06E+70
dc.relation.ispartofProcedia Chemistry
dc.relation.urihttp://cdm21054.contentdm.oclc.org/cdm/ref/collection/IR/id/835
dc.subjectChemistry
dc.subjectNanoscience and nanotechnology
dc.titleMEMS stage integrated with microlens arrays for high-resolution beam steering
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorGökçe, Sertan Kutal
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorAtaman, Çağlar
local.contributor.kuauthorArslan, Aslıhan
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isParentOrgUnitOfPublication8e756b23-2d4a-4ce8-b1b3-62c794a8c164
relation.isParentOrgUnitOfPublication.latestForDiscovery8e756b23-2d4a-4ce8-b1b3-62c794a8c164

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