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MEMS stage integrated with microlens arrays for high-resolution beam steering

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dc.contributor.coauthorHibert, Cyrille
dc.contributor.coauthorSeren, Hüseyin R.
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorResearcher, Arslan, Aslıhan
dc.contributor.kuauthorPhD Student, Ataman, Çağlar
dc.contributor.kuauthorMaster Student, Gökçe, Sertan Kutal
dc.contributor.kuauthorResearcher, Holmstrom, Sven
dc.contributor.kuauthorFaculty Member, Ürey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.date.accessioned2024-11-09T12:29:09Z
dc.date.issued2009
dc.description.abstractA novel micromechanical stage with a uniaxial set of combfingers capable of 2D actuation is designed and developed. Driven at resonance the stage deflects up to 108 mu m out-of-plane and 102 mu m in-plane, with 140V and 94V peak-to-peak actuation voltage, respectively.
dc.description.fulltextYES
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuTÜBİTAK
dc.description.sponsorshipScientific and Technological Research Council of Turkey (TÜBİTAK)
dc.description.versionPublisher version
dc.identifier.doi10.1016/j.proche.2009.07.329
dc.identifier.embargoNO
dc.identifier.filenameinventorynoIR00836
dc.identifier.issn1876-6196
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-71549140937
dc.identifier.urihttps://doi.org/10.1016/j.proche.2009.07.329
dc.identifier.wos275995600112
dc.keywordsHybrid integration
dc.keywordsComb drive
dc.keywordsBeam steering
dc.language.isoeng
dc.publisherElsevier
dc.relation.grantno1.06E+70
dc.relation.ispartofProcedia Chemistry
dc.relation.urihttp://cdm21054.contentdm.oclc.org/cdm/ref/collection/IR/id/835
dc.subjectChemistry
dc.subjectNanoscience and nanotechnology
dc.titleMEMS stage integrated with microlens arrays for high-resolution beam steering
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorGökçe, Sertan Kutal
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorAtaman, Çağlar
local.contributor.kuauthorArslan, Aslıhan
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isParentOrgUnitOfPublication8e756b23-2d4a-4ce8-b1b3-62c794a8c164
relation.isParentOrgUnitOfPublication.latestForDiscovery8e756b23-2d4a-4ce8-b1b3-62c794a8c164

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