Publication: MEMS stage integrated with microlens arrays for high-resolution beam steering
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Program
KU Authors
Co-Authors
Hibert, Cyrille
Seren, Hüseyin R.
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Embargo Status
NO
Journal Title
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Abstract
A novel micromechanical stage with a uniaxial set of combfingers capable of 2D actuation is designed and developed. Driven at resonance the stage deflects up to 108 mu m out-of-plane and 102 mu m in-plane, with 140V and 94V peak-to-peak actuation voltage, respectively.
Source
Publisher
Elsevier
Subject
Chemistry, Nanoscience and nanotechnology
Citation
Has Part
Source
Procedia Chemistry
Book Series Title
Edition
DOI
10.1016/j.proche.2009.07.329