Publication: MEMS stage integrated with microlens arrays for high-resolution beam steering
Files
Program
KU Authors
Co-Authors
Hibert, Cyrille
Seren, Hüseyin R.
Advisor
Publication Date
2009
Language
English
Type
Conference proceeding
Journal Title
Journal ISSN
Volume Title
Abstract
A novel micromechanical stage with a uniaxial set of combfingers capable of 2D actuation is designed and developed. Driven at resonance the stage deflects up to 108 mu m out-of-plane and 102 mu m in-plane, with 140V and 94V peak-to-peak actuation voltage, respectively.
Description
Source:
Procedia Chemistry
Publisher:
Elsevier
Keywords:
Subject
Chemistry, Nanoscience and nanotechnology