Publication:
MEMS stage integrated with microlens arrays for high-resolution beam steering

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Hibert, Cyrille
Seren, Hüseyin R.

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NO

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Abstract

A novel micromechanical stage with a uniaxial set of combfingers capable of 2D actuation is designed and developed. Driven at resonance the stage deflects up to 108 mu m out-of-plane and 102 mu m in-plane, with 140V and 94V peak-to-peak actuation voltage, respectively.

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Elsevier

Subject

Chemistry, Nanoscience and nanotechnology

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Procedia Chemistry

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DOI

10.1016/j.proche.2009.07.329

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