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Characterization of a hybrid nanowire-MEMS force sensor using direct actuation

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dc.contributor.coauthorPruchnik, Bartosz
dc.contributor.coauthorKwoka, Krzysztof
dc.contributor.coauthorPiasecki, Tomasz
dc.contributor.coauthorAydogan, Cemal
dc.contributor.coauthorRangelow, Ivo W.
dc.contributor.coauthorYalcinkaya, Arda Deniz
dc.contributor.coauthorBayraktar, Halil
dc.contributor.coauthorGotszalk, Teodor
dc.contributor.departmentDepartment of Mechanical Engineering
dc.contributor.departmentn2STAR (Koç University Nanofabrication and Nanocharacterization Center for Scientifc and Technological Advanced Research)
dc.contributor.departmentKUYTAM (Koç University Surface Science and Technology Center)
dc.contributor.kuauthorJedari Ghourichaei, Masoud
dc.contributor.kuauthorKarimzadehkhouei, Mehrdad
dc.contributor.kuauthorAydın, Onur
dc.contributor.kuauthorAksoy, Bekir
dc.contributor.kuauthorNadar, Gökhan
dc.contributor.kuauthorAlaca, Burhanettin Erdem
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteResearch Center
dc.date.accessioned2025-09-10T04:58:46Z
dc.date.available2025-09-09
dc.date.issued2025
dc.description.abstractIn this study, we describe a process of characterization of a 3-axial force sensor with piezoresistive silicon nanowires. We present a unique method for determining the gauge factor (GF) of a volumetric structure with a stiffness exceeding 10(5)N m(-1) and resonant frequencies above 10 MHz. We employed an uncommon Lab-in-Scanning Electron Microscope (Lab-in-SEM, LIS) approach to perform a full characterization schedule under vacuum conditions using direct actuation with nanomanipulators. We discuss the force evaluation errors arising from the sample support stiffness. Finally, we present the results of GF measurements of the multi-axially investigated device with GF of over 20 for axial and over 40 for transverse loading.
dc.description.fulltextYes
dc.description.harvestedfromManual
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessGold OA
dc.description.publisherscopeInternational
dc.description.readpublishN/A
dc.description.sponsoredbyTubitakEuTÜBİTAK
dc.description.sponsorshipPolish National Centre for Research and Development [01PT/0002/21]; Scientific and Technological Research Council of Turkiye
dc.description.versionPublished Version
dc.description.volume36
dc.identifier.doi10.1088/1361-6501/adeac6
dc.identifier.eissn1361-6501
dc.identifier.embargoNo
dc.identifier.filenameinventorynoIR06493
dc.identifier.grantno120N361
dc.identifier.grantno118C155
dc.identifier.issn0957-0233
dc.identifier.issue7
dc.identifier.quartileQ1
dc.identifier.scopus2-s2.0-105011484065
dc.identifier.urihttps://doi.org/10.1088/1361-6501/adeac6
dc.identifier.urihttps://hdl.handle.net/20.500.14288/30363
dc.identifier.wos001533753600001
dc.keywordsNanowire
dc.keywordsMEMS
dc.keywordsSensors
dc.keywordsActuation
dc.keywordsSiNW
dc.keywordsLab-in-SEM
dc.keywordsLiS
dc.language.isoeng
dc.publisherIOP Publishing Ltd
dc.relation.affiliationKoç University
dc.relation.collectionKoç University Institutional Repository
dc.relation.ispartofMeasurement Science and Technology
dc.relation.openaccessYes
dc.rightsCC BY (Attribution)
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/
dc.subjectEngineering
dc.subjectInstruments and instrumentation
dc.titleCharacterization of a hybrid nanowire-MEMS force sensor using direct actuation
dc.typeJournal Article
dspace.entity.typePublication
person.familyNameJedari Ghourichaei
person.familyNameKarimzadehkhouei
person.familyNameAydın
person.familyNameAksoy
person.familyNameNadar
person.familyNameAlaca
person.givenNameMasoud
person.givenNameMehrdad
person.givenNameOnur
person.givenNameBekir
person.givenNameGökhan
person.givenNameBurhanettin Erdem
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relation.isOrgUnitOfPublication10041712-016f-439e-ae04-a70d31ed59b5
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