Publication: Characterization of a hybrid nanowire-MEMS force sensor using direct actuation
Program
KU Authors
Co-Authors
Pruchnik, Bartosz
Kwoka, Krzysztof
Piasecki, Tomasz
Ghourichaei, Masoud Jedari
Kerimzade, Umut
Aydin, Onur
Aksoy, Bekir
Aydogan, Cemal
Nadar, Gokhan
Rangelow, Ivo W.
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Abstract
In this study, we describe a process of characterization of a 3-axial force sensor with piezoresistive silicon nanowires. We present a unique method for determining the gauge factor (GF) of a volumetric structure with a stiffness exceeding 10(5)N m(-1) and resonant frequencies above 10 MHz. We employed an uncommon Lab-in-Scanning Electron Microscope (Lab-in-SEM, LIS) approach to perform a full characterization schedule under vacuum conditions using direct actuation with nanomanipulators. We discuss the force evaluation errors arising from the sample support stiffness. Finally, we present the results of GF measurements of the multi-axially investigated device with GF of over 20 for axial and over 40 for transverse loading.
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Publisher
Iop Publishing Ltd
Subject
Engineering, Multidisciplinary, Instruments & Instrumentation
Citation
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Source
Measurement science and technology
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DOI
10.1088/1361-6501/adeac6
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CC BY (Attribution)
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Creative Commons license
Except where otherwised noted, this item's license is described as CC BY (Attribution)