Publication: Characterization of a hybrid nanowire-MEMS force sensor using direct actuation
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Pruchnik, Bartosz
Kwoka, Krzysztof
Piasecki, Tomasz
Aydogan, Cemal
Rangelow, Ivo W.
Yalcinkaya, Arda Deniz
Bayraktar, Halil
Gotszalk, Teodor
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Abstract
In this study, we describe a process of characterization of a 3-axial force sensor with piezoresistive silicon nanowires. We present a unique method for determining the gauge factor (GF) of a volumetric structure with a stiffness exceeding 10(5)N m(-1) and resonant frequencies above 10 MHz. We employed an uncommon Lab-in-Scanning Electron Microscope (Lab-in-SEM, LIS) approach to perform a full characterization schedule under vacuum conditions using direct actuation with nanomanipulators. We discuss the force evaluation errors arising from the sample support stiffness. Finally, we present the results of GF measurements of the multi-axially investigated device with GF of over 20 for axial and over 40 for transverse loading.
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IOP Publishing Ltd
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Measurement Science and Technology
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DOI
10.1088/1361-6501/adeac6
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CC BY (Attribution)
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Creative Commons license
Except where otherwise noted, this item's license is described as CC BY (Attribution)