Publication: Repetitive control of an XYZ piezo-stage for faster nano-scanning numerical simulations and experiments
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Program
Mechanical Engineering
KU-Authors
KU Authors
Co-Authors
Authors
Cebeci, Selman A.
Advisor
Başdoğan, Çağatay
Publication Date
Language
English
Type
Journal Title
Journal ISSN
Volume Title
Abstract
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Publisher:
Koç University
Keywords:
Subject
Scanning systems, Optical scanners