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Repetitive control of an XYZ piezo-stage for faster nano-scanning numerical simulations and experiments

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dc.contributor.advisorBaşdoğan, Çağatay
dc.contributor.advisorid0000-0002-6382-7334
dc.contributor.authorCebeci, Selman A.
dc.contributor.instituteKoç University Graduate School of Sciences and Engineering
dc.contributor.programMechanical Engineering
dc.contributor.yokid125489
dc.date.accessioned2024-11-09T22:48:44Z
dc.date.issued2011
dc.descriptionviii, 45 l. : ill. ; 30 cm.
dc.identifier.urihttps://hdl.handle.net/20.500.14288/6379
dc.keywordsNano-scanning
dc.languageEnglish
dc.publisherKoç University
dc.relation.collectionKU Theses and Dissertations
dc.rightsrestrictedAccess
dc.rights.copyrightsnote© All Rights Reserved. Accessible to Koç University Affiliated Users Only!
dc.subjectScanning systems
dc.subjectOptical scanners
dc.thesis.degreeMaster's Degree
dc.thesis.grantorİstanbul
dc.titleRepetitive control of an XYZ piezo-stage for faster nano-scanning numerical simulations and experiments
dc.typeThesis
dspace.entity.typePublication
relation.isAdvisorOfThesis3296a078-6760-4af8-addd-62500c43ae7a
relation.isAdvisorOfThesis.latestForDiscovery3296a078-6760-4af8-addd-62500c43ae7a

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