Publication:
A 35--μm pitch IR thermo-mechanical MEMS sensor with AC-coupled optical readout

dc.contributor.coauthorFerhanoğlu, Onur
dc.contributor.coauthorTorun, Hamdi
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorAdiyan, Ulaş
dc.contributor.kuauthorÇivitçi, Fehmi
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteCollege of Sciences
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T23:29:59Z
dc.date.issued2015
dc.description.abstractA thermo-mechanical MEMS detector with 35-mu m pixel pitch is designed, fabricated, and characterized. This fabricated design has one of the smallest pixel sizes among the IR thermo-mechanical MEMS sensors in the literature. The working principle of the MEMS detector is based on the bimaterial effect that creates a deflection when exposed to IR radiation in the 812-mu m waveband. The nanometer level out of plane mechanical motion is observed in response to IR heating of the pixel, which is detected by a diffraction grating-based optical readout. Performance of MEMS sensor arrays with optical readout have been limited by a large DC bias that accompanies a small AC signal. We developed a novel optical setup to reduce the DC term and the related noise using an AC-coupled detection scheme. Detailed noise characterization of the pixel and the readout system is reported in this paper. The noise equivalent temperature difference of our detector is measured as 216 mK using f/0.86 lens with the AC-coupled optical readout. Finally, we obtained a thermal image using a single MEMS pixel combined with a scanning configuration. Despite the reduced pixel size, the measured noise levels are comparable to the state-of-the-art thermo-mechanical IR sensors.
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.issue4
dc.description.openaccessNO
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipAselsan Inc., Turkey This work was supported by Aselsan Inc., Turkey.
dc.description.volume21
dc.identifier.doi10.1109/JSTQE.2014.2384503
dc.identifier.eissn1558-4542
dc.identifier.issn1077-260X
dc.identifier.quartileQ1
dc.identifier.scopus2-s2.0-84921886251
dc.identifier.urihttps://doi.org/10.1109/JSTQE.2014.2384503
dc.identifier.urihttps://hdl.handle.net/20.500.14288/12159
dc.identifier.wos348455900001
dc.keywordsThermo-mechanical MEMS
dc.keywordsIR imaging
dc.keywordsOptical readout
dc.keywordsDiffraction grating
dc.language.isoeng
dc.publisherIEEE-Inst Electrical Electronics Engineers Inc
dc.relation.ispartofIEEE Journal of Selected Topics in Quantum Electronics
dc.subjectEngineering, electrical and electronic
dc.subjectQuantum science and technology
dc.subjectOptics
dc.subjectPhysics, applied
dc.titleA 35--μm pitch IR thermo-mechanical MEMS sensor with AC-coupled optical readout
dc.typeJournal Article
dspace.entity.typePublication
local.contributor.kuauthorAdiyan, Ulaş
local.contributor.kuauthorÇivitçi, Fehmi
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit1College of Sciences
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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