Publication: Resonant cantilever bio sensor with integrated grating readout
Program
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N/A
Advisor
Publication Date
Language
English
Journal Title
Journal ISSN
Volume Title
Abstract
Microcantilever based biosensor is fabricated and tested. The main features are the simple single mask fabrication, grating based sensitive optical readout, magnetic thin-film actuation, and suitability for parallel array operation. Sub-picogram mass detection sensitivity demonstrated.
Source:
2008 IEEE/LEOS International Conference on Optical Mems and Nanophotonics
Publisher:
IEEE
Keywords:
Subject
Engineering, Electrical and electronic engineering, Nanoscience, Nanotechnology, Optics