Publication: Resonant cantilever bio sensor with integrated grating readout
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N/A
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Abstract
Microcantilever based biosensor is fabricated and tested. The main features are the simple single mask fabrication, grating based sensitive optical readout, magnetic thin-film actuation, and suitability for parallel array operation. Sub-picogram mass detection sensitivity demonstrated.
Source
Publisher
IEEE
Subject
Engineering, Electrical and electronic engineering, Nanoscience, Nanotechnology, Optics
Citation
Has Part
Source
2008 IEEE/LEOS International Conference on Optical Mems and Nanophotonics
Book Series Title
Edition
DOI
10.1109/OMEMS.2008.4607821