Publication:
Resonant cantilever bio sensor with integrated grating readout

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dc.contributor.coauthorN/A
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentDepartment of Mechanical Engineering
dc.contributor.departmentDepartment of Chemical and Biological Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorAlaca, Burhanettin Erdem
dc.contributor.kuauthorKavaklı, İbrahim Halil
dc.contributor.kuauthorOcaklı, Hüseyin İlker
dc.contributor.kuauthorÖzber, Natali
dc.contributor.kuauthorÖztürk, Alibey
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T23:47:15Z
dc.date.issued2008
dc.description.abstractMicrocantilever based biosensor is fabricated and tested. The main features are the simple single mask fabrication, grating based sensitive optical readout, magnetic thin-film actuation, and suitability for parallel array operation. Sub-picogram mass detection sensitivity demonstrated.
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessNO
dc.description.sponsoredbyTubitakEuN/A
dc.identifier.doi10.1109/OMEMS.2008.4607821
dc.identifier.isbn978-1-4244-1917-3
dc.identifier.scopus2-s2.0-54049156568
dc.identifier.urihttps://doi.org/10.1109/OMEMS.2008.4607821
dc.identifier.urihttps://hdl.handle.net/20.500.14288/14082
dc.identifier.wos264556700024
dc.keywordsCantilever sensor
dc.keywordsMagnetic actuation
dc.keywordsMass sensor
dc.keywordsArray
dc.language.isoeng
dc.publisherIEEE
dc.relation.ispartof2008 IEEE/LEOS International Conference on Optical Mems and Nanophotonics
dc.subjectEngineering
dc.subjectElectrical and electronic engineering
dc.subjectNanoscience
dc.subjectNanotechnology
dc.subjectOptics
dc.titleResonant cantilever bio sensor with integrated grating readout
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorOcaklı, Hüseyin İlker
local.contributor.kuauthorÖztürk, Alibey
local.contributor.kuauthorÖzber, Natali
local.contributor.kuauthorKavaklı, İbrahim Halil
local.contributor.kuauthorAlaca, Burhanettin Erdem
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Chemical and Biological Engineering
local.publication.orgunit2Department of Mechanical Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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