Publication: A VOC sensor based on micromechanical cantilever functionalized with ZNO nanorods
Program
KU Authors
Co-Authors
Kosemen, A.
Öztürk, S.
Yerli, Y.
Öztürk, Z.Z.
Editor & Affiliation
Compiler & Affiliation
Translator
Other Contributor
Date
Language
Embargo Status
N/A
Journal Title
Journal ISSN
Volume Title
Alternative Title
Abstract
This study reports a novel method for volatile organic compound (VOC) detection with a functionalized microcantilever-based sensor. The devices are fabricated with lithography and electrodeposition processes. ZnO nanorods are deposited on Ni microcantilevers in order to expand the total sensitive area. The VOC sensor measurements are carried out with magnetic actuation and optical read out. The phase stability and limit of detection for diethylamine (DEA) were 0.02° and below 100 ppm, respectively. ZnO nanorod coated microcantilevers have potential for VOC sensor especially for amine groups due to the high surface area-to-volume ratio.
Source
Publisher
Chemical and Biological Microsystems Society
Subject
Engineering, Electrical and electronic engineering
Citation
Has Part
Source
17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013
Book Series Title
Edition
DOI
item.page.datauri
Link
Rights
Copyrighted