Publication:
A VOC sensor based on micromechanical cantilever functionalized with ZNO nanorods

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dc.contributor.coauthorKosemen, A.
dc.contributor.coauthorÖztürk, S.
dc.contributor.coauthorYerli, Y.
dc.contributor.coauthorÖztürk, Z.Z.
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentDepartment of Mechanical Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorÇakmak, Onur
dc.contributor.kuauthorErmek, Erhan
dc.contributor.kuauthorKılınç, Necmettin
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T22:48:49Z
dc.date.issued2013
dc.description.abstractThis study reports a novel method for volatile organic compound (VOC) detection with a functionalized microcantilever-based sensor. The devices are fabricated with lithography and electrodeposition processes. ZnO nanorods are deposited on Ni microcantilevers in order to expand the total sensitive area. The VOC sensor measurements are carried out with magnetic actuation and optical read out. The phase stability and limit of detection for diethylamine (DEA) were 0.02° and below 100 ppm, respectively. ZnO nanorod coated microcantilevers have potential for VOC sensor especially for amine groups due to the high surface area-to-volume ratio.
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipAgilent
dc.description.sponsorshipCentre for Biological Signalling Studies (BIOSS)
dc.description.sponsorshipForum for Applied Informatics and Microengineering (FAIM)
dc.description.sponsorshipHSG-IMIT
dc.description.sponsorshipMicroTec Sudwest
dc.description.sponsorshipRoche Diagnostics
dc.description.volume3
dc.identifier.isbn9781-6326-6624-6
dc.identifier.linkhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-84902495016&partnerID=40&md5=fdf91cce55c2037269a7e2c4daa4f176
dc.identifier.scopus2-s2.0-84902495016
dc.identifier.urihttps://hdl.handle.net/20.500.14288/6400
dc.keywordsElectrodeposition
dc.keywordsMicromechanical sensor
dc.keywordsVOC sensing
dc.keywordsZnO nanorod
dc.language.isoeng
dc.publisherChemical and Biological Microsystems Society
dc.relation.ispartof17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013
dc.subjectEngineering
dc.subjectElectrical and electronic engineering
dc.titleA VOC sensor based on micromechanical cantilever functionalized with ZNO nanorods
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorKılınç, Necmettin
local.contributor.kuauthorÇakmak, Onur
local.contributor.kuauthorErmek, Erhan
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1College of Engineering
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Department of Mechanical Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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