Publication:
A VOC sensor based on micromechanical cantilever functionalized with ZNO nanorods

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dc.conference.dateOCT 27-31, 2013
dc.conference.locationFreiburg, Germany
dc.conference.organizerChemical and Biological Microsystems Society
dc.contributor.coauthorKosemen, A.
dc.contributor.coauthorÖztürk, S.
dc.contributor.coauthorYerli, Y.
dc.contributor.coauthorÖztürk, Z.Z.
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.facultymemberYes
dc.contributor.kuauthorÇakmak, Onur
dc.contributor.kuauthorErmek, Erhan
dc.contributor.kuauthorKılınç, Necmettin
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.date.accessioned2024-11-09T22:48:49Z
dc.date.issued2013
dc.description.abstractThis study reports a novel method for volatile organic compound (VOC) detection with a functionalized microcantilever-based sensor. The devices are fabricated with lithography and electrodeposition processes. ZnO nanorods are deposited on Ni microcantilevers in order to expand the total sensitive area. The VOC sensor measurements are carried out with magnetic actuation and optical read out. The phase stability and limit of detection for diethylamine (DEA) were 0.02° and below 100 ppm, respectively. ZnO nanorod coated microcantilevers have potential for VOC sensor especially for amine groups due to the high surface area-to-volume ratio.
dc.description.fulltextNo
dc.description.harvestedfromManual
dc.description.indexedbyScopus
dc.description.peerreviewstatusN/A
dc.description.publisherscopeInternational
dc.description.readpublishN/A
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipAgilent
dc.description.sponsorshipCentre for Biological Signalling Studies (BIOSS)
dc.description.sponsorshipForum for Applied Informatics and Microengineering (FAIM)
dc.description.sponsorshipHSG-IMIT
dc.description.sponsorshipMicroTec sudwest
dc.description.sponsorshipRoche diagnostics
dc.description.studentonlypublicationNo
dc.description.studentpublicationYes
dc.description.versionN/A
dc.identifier.embargoN/A
dc.identifier.isbn9781632666246
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-84902495016
dc.identifier.urihttps://hdl.handle.net/20.500.14288/6400
dc.keywordsElectrodeposition
dc.keywordsMicromechanical sensor
dc.keywordsVOC sensing
dc.keywordsZnO nanorod
dc.language.isoeng
dc.publisherChemical and Biological Microsystems Society
dc.relation.affiliationKoç University
dc.relation.collectionKoç University Institutional Repository
dc.relation.ispartof17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013
dc.relation.openaccessNo
dc.rightsCopyrighted
dc.subjectEngineering
dc.subjectElectrical and electronic engineering
dc.titleA VOC sensor based on micromechanical cantilever functionalized with ZNO nanorods
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorKılınç, Necmettin
local.contributor.kuauthorÇakmak, Onur
local.contributor.kuauthorErmek, Erhan
local.contributor.kuauthorÜrey, Hakan
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isParentOrgUnitOfPublication8e756b23-2d4a-4ce8-b1b3-62c794a8c164
relation.isParentOrgUnitOfPublication.latestForDiscovery8e756b23-2d4a-4ce8-b1b3-62c794a8c164

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