Publication: Fracture toughness of AlTiN coatings investigated by nanoindentation and microcantilever bending
Program
KU-Authors
KU Authors
Co-Authors
Kaygusuz, Burcin
Karadayi, Ozcan
Kazmanli, Kuersat
Ozerinc, Sezer
Publication Date
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Type
Embargo Status
Journal Title
Journal ISSN
Volume Title
Alternative Title
Abstract
Metal nitride coatings are increasingly used in MEMS applications. The brittle nature of these coatings makes fracture one of the main failure mechanisms during operation. Therefore, quantifying the fracture toughness of nitride coatings in a reliable fashion is important to understand the failure behavior and to optimize device performance and reliability. This study investigated the fracture toughness of AlTiN coatings produced by cathodic arc evaporation, a widely used technique in the industry. Nanoindentation and microcantilever bending-based measurements indicated a fracture toughness of 6.6 and 4.8 MPa & sdot;m1/2, respectively. The lower toughness results of microcantilever bending were attributed to the columnar growth of the coating, which promoted crack propagation perpendicular to the film surface. The results provide useful data toward a better understanding of the fracture of hard coatings and give insight into the advantages and disadvantages of different measurement methods.
Source
Publisher
Elsevier Science Sa
Subject
Materials science, multidisciplinary, Materials science, coatings and films, Physics, applied, Physics, condensed matter
Citation
Has Part
Source
Thin Solid Films
Book Series Title
Edition
DOI
10.1016/j.tsf.2024.140199