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A 2D MEMS stage for optical applications

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dc.contributor.coauthorAtaman, Çağlar
dc.contributor.coauthorPetremand, Yves
dc.contributor.coauthorNoell, Wilfried
dc.contributor.coauthorEpitaux, Marc
dc.contributor.coauthorde Rooij, Nico F.
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuprofileFaculty Member
dc.contributor.otherDepartment of Electrical and Electronics Engineering
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.yokid8579
dc.date.accessioned2024-11-09T11:48:55Z
dc.date.issued2006
dc.description.abstractA 2D MEMS platform for a microlens scanner application is reported. The platform is fabricated on an SOI wafer with 50/μm thick device layer. Entire device is defined with a single etching step on the same layer. Through four S-shaped beams, the device is capable of producing nonlinear 2D motion from linear ID translation of two pairs of comb actuator sets. The device has a clear aperture of 2mm by 2mm, which is hallowed from the backside for micro-optics assembly. In this paper, a numerical device model and its validation via experimental characterization results are presented. Integration of the micro-optical components with the stage is also discussed. Additionally, a new driving scheme to minimize the settling time of the device in DC operation is explored.
dc.description.fulltextYES
dc.description.indexedbyWoS
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuEU
dc.description.sponsorshipNEMO (FP6 Network of Excellence in Micro-Optics)
dc.description.sponsorshipIntel Corp
dc.description.versionPublisher version
dc.formatpdf
dc.identifier.doi10.1117/12.664777
dc.identifier.embargoNO
dc.identifier.filenameinventorynoIR01002
dc.identifier.isbn0819461121
dc.identifier.isbn9780819461124
dc.identifier.issn0277-786X
dc.identifier.linkhttps://doi.org/10.1117/12.664777
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-33746687003
dc.identifier.urihttps://hdl.handle.net/20.500.14288/626
dc.keywords2D platform
dc.keywordsBeam steering
dc.keywordsComb actuator
dc.keywordsMicro-optics
dc.languageEnglish
dc.publisherSociety of Photo-optical Instrumentation Engineers (SPIE)
dc.relation.urihttp://cdm21054.contentdm.oclc.org/cdm/ref/collection/IR/id/999
dc.sourceProceedings of SPIE
dc.subjectEngineering
dc.subjectElectrical and electronic
dc.titleA 2D MEMS stage for optical applications
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authorid0000-0002-2031-7967
local.contributor.kuauthorÜrey, Hakan
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0

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