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A 2D MEMS stage for optical applications

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dc.contributor.coauthorAtaman, Çağlar
dc.contributor.coauthorPetremand, Yves
dc.contributor.coauthorNoell, Wilfried
dc.contributor.coauthorEpitaux, Marc
dc.contributor.coauthorde Rooij, Nico F.
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuprofileFaculty Member
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.yokid8579
dc.date.accessioned2024-11-09T11:48:55Z
dc.date.issued2006
dc.description.abstractA 2D MEMS platform for a microlens scanner application is reported. The platform is fabricated on an SOI wafer with 50/μm thick device layer. Entire device is defined with a single etching step on the same layer. Through four S-shaped beams, the device is capable of producing nonlinear 2D motion from linear ID translation of two pairs of comb actuator sets. The device has a clear aperture of 2mm by 2mm, which is hallowed from the backside for micro-optics assembly. In this paper, a numerical device model and its validation via experimental characterization results are presented. Integration of the micro-optical components with the stage is also discussed. Additionally, a new driving scheme to minimize the settling time of the device in DC operation is explored.
dc.description.fulltextYES
dc.description.indexedbyWoS
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuEU
dc.description.sponsorshipNEMO (FP6 Network of Excellence in Micro-Optics)
dc.description.sponsorshipIntel Corp
dc.description.versionPublisher version
dc.formatpdf
dc.identifier.doi10.1117/12.664777
dc.identifier.embargoNO
dc.identifier.filenameinventorynoIR01002
dc.identifier.isbn0819461121
dc.identifier.isbn9780819461124
dc.identifier.issn0277-786X
dc.identifier.linkhttps://doi.org/10.1117/12.664777
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-33746687003
dc.identifier.urihttps://hdl.handle.net/20.500.14288/626
dc.keywords2D platform
dc.keywordsBeam steering
dc.keywordsComb actuator
dc.keywordsMicro-optics
dc.languageEnglish
dc.publisherSociety of Photo-optical Instrumentation Engineers (SPIE)
dc.relation.urihttp://cdm21054.contentdm.oclc.org/cdm/ref/collection/IR/id/999
dc.sourceProceedings of SPIE
dc.subjectEngineering
dc.subjectElectrical and electronic
dc.titleA 2D MEMS stage for optical applications
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authorid0000-0002-2031-7967
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isParentOrgUnitOfPublication8e756b23-2d4a-4ce8-b1b3-62c794a8c164
relation.isParentOrgUnitOfPublication.latestForDiscovery8e756b23-2d4a-4ce8-b1b3-62c794a8c164

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