Publication: Mems scanners actuated with mechanical coupling and comb drives
Files
Program
Electrical and Computer Engineering
KU-Authors
KU Authors
Co-Authors
Authors
Arslan, Aslıhan
Advisor
Ürey, Hakan
Publication Date
2008
Language
English
Type
Thesis
Journal Title
Journal ISSN
Volume Title
Abstract
Description
xx, 113 l. : ill 30 cm.
Source:
Publisher:
Koç University
Keywords:
Subject
Scanning systems, Optical scanners