Publication: Mems scanners actuated with mechanical coupling and comb drives
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Program
Electrical and Computer Engineering
KU-Authors
KU Authors
Co-Authors
Authors
Arslan, Aslıhan
Advisor
Ürey, Hakan
Publication Date
Language
English
Type
Journal Title
Journal ISSN
Volume Title
Abstract
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Publisher:
Koç University
Keywords:
Subject
Scanning systems, Optical scanners