Publication:
Mems scanners actuated with mechanical coupling and comb drives

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dc.contributor.advisorÜrey, Hakan
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorArslan, Aslıhan
dc.contributor.programElectrical and Computer Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.coverage.spatialİstanbul
dc.date.accessioned2024-11-09T22:36:22Z
dc.date.issued2008
dc.format.extentxx, 113 l. : ill 30 cm.
dc.identifier.urihttps://hdl.handle.net/20.500.14288/5749
dc.keywordsMicroscanner
dc.keywordsMechanical coupling
dc.keywordsElectrostatic actuation
dc.keywordsComb drive
dc.language.isoeng
dc.publisherKoç University
dc.relation.collectionKU Theses and Dissertations
dc.rightsrestrictedAccess
dc.rights.copyrightsnote© All Rights Reserved. Accessible to Koç University Affiliated Users Only!
dc.subjectScanning systems
dc.subjectOptical scanners
dc.titleMems scanners actuated with mechanical coupling and comb drives
dc.typeThesis
dspace.entity.typePublication
local.contributor.kuauthorArslan, Aslıhan
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