Publication:
Lamellar grating based MEMS fourier transform spectrometer

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dc.conference.dateAUG 9-12, 2010
dc.conference.locationSapporo, Japan
dc.conference.organizer2010 International Conference on Optical MEMS and Nanophotonics (Optical MEMS and Nanophotonics 2010)
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.facultymemberYes
dc.contributor.kuauthorAyerden, Nadire Pelin
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorSeren, Hüseyin Rahmi
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.date.accessioned2024-11-09T23:18:32Z
dc.date.issued2010
dc.description.abstractA Lamellar grating interferometer based Fourier Transform Infrared Spectrometer (FTIR) with out-of-plane resonant mode is implemented and characterized. Device has 10mm∧2 clear aperture. Dynamic diffraction grating is comb-actuated and a maximum p-p deflection of 355 μm is obtained at 76 V. The excitation frequency is 971 Hz and deflection frequency of 485.5Hz.
dc.description.fulltextNo
dc.description.harvestedfromManual
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.peerreviewstatusN/A
dc.description.publisherscopeInternational
dc.description.readpublishN/A
dc.description.sponsoredbyTubitakEuEU
dc.description.sponsorshipThis project is sponsored by MEMFIS project, which is supported by EC FP7 program grant no: 224151. The authors would like to thank all MEMFIS partners for their contributions
dc.description.studentonlypublicationNo
dc.description.studentpublicationYes
dc.description.versionN/A
dc.identifier.WoSQuartileN/A
dc.identifier.doi10.1109/OMEMS.2010.5672163
dc.identifier.embargoN/A
dc.identifier.grantno224151
dc.identifier.isbn9781424489251
dc.identifier.scopus2-s2.0-78751523039
dc.identifier.urihttps://doi.org/10.1109/OMEMS.2010.5672163
dc.identifier.urihttps://hdl.handle.net/20.500.14288/10396
dc.keywordsDynamic diffraction
dc.keywordsExcitation frequency
dc.keywordsFourier transform infrared spectrometer
dc.keywordsFourier transform spectrometers
dc.keywordsLamellar gratings
dc.keywordsOut-of-plane
dc.keywordsResonant mode
dc.keywordsFourier transform infrared spectroscopy
dc.keywordsMOEMS
dc.keywordsNanophotonics
dc.keywordsSpectrometers
dc.keywordsSpectrometry
dc.keywordsFourier transforms
dc.language.isoeng
dc.publisherInstitute of Electrical and Electronics Engineers
dc.relation.affiliationKoç University
dc.relation.collectionKoç University Institutional Repository
dc.relation.ispartof2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
dc.relation.openaccessN/A
dc.rightsN/A
dc.subjectElectrical electronics engineering
dc.subjectNanophotonics
dc.subjectSpectrometers
dc.titleLamellar grating based MEMS fourier transform spectrometer
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorÜrey, Hakan
local.contributor.kuauthorAyerden, Nadire Pelin
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorSeren, Hüseyin Rahmi
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relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isParentOrgUnitOfPublication8e756b23-2d4a-4ce8-b1b3-62c794a8c164
relation.isParentOrgUnitOfPublication.latestForDiscovery8e756b23-2d4a-4ce8-b1b3-62c794a8c164

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