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Lamellar grating based MEMS fourier transform spectrometer

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dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorAyerden, Nadire Pelin
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorSeren, Hüseyin Rahmi
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T23:18:32Z
dc.date.issued2010
dc.description.abstractA Lamellar grating interferometer based Fourier Transform Infrared Spectrometer (FTIR) with out-of-plane resonant mode is implemented and characterized. Device has 10mm∧2 clear aperture. Dynamic diffraction grating is comb-actuated and a maximum p-p deflection of 355 μm is obtained at 76 V. The excitation frequency is 971 Hz and deflection frequency of 485.5Hz.
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipMEMFIS
dc.identifier.doi10.1109/OMEMS.2010.5672163
dc.identifier.isbn9781-4244-8925-1
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-78751523039
dc.identifier.urihttps://doi.org/10.1109/OMEMS.2010.5672163
dc.identifier.urihttps://hdl.handle.net/20.500.14288/10396
dc.keywordsDynamic diffraction
dc.keywordsExcitation frequency
dc.keywordsFourier transform infrared spectrometer
dc.keywordsFourier transform spectrometers
dc.keywordsLamellar gratings
dc.keywordsOut-of-plane
dc.keywordsResonant mode
dc.keywordsFourier transform infrared spectroscopy
dc.keywordsMOEMS
dc.keywordsNanophotonics
dc.keywordsSpectrometers
dc.keywordsSpectrometry
dc.keywordsFourier transforms
dc.language.isoeng
dc.publisherIEEE
dc.relation.ispartof2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
dc.subjectElectrical electronics engineering
dc.titleLamellar grating based MEMS fourier transform spectrometer
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorÜrey, Hakan
local.contributor.kuauthorAyerden, Nadire Pelin
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorSeren, Hüseyin Rahmi
local.publication.orgunit1College of Engineering
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
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