Publication:
Lamellar grating based MEMS fourier transform spectrometer

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dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentN/A
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentN/A
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuauthorAyerden, Nadire Pelin
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorSeren, Hüseyin Rahmi
dc.contributor.kuprofileFaculty Member
dc.contributor.kuprofileMaster Student
dc.contributor.kuprofileResearcher
dc.contributor.kuprofileMaster Student
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.yokid8579
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.date.accessioned2024-11-09T23:18:32Z
dc.date.issued2010
dc.description.abstractA Lamellar grating interferometer based Fourier Transform Infrared Spectrometer (FTIR) with out-of-plane resonant mode is implemented and characterized. Device has 10mm∧2 clear aperture. Dynamic diffraction grating is comb-actuated and a maximum p-p deflection of 355 μm is obtained at 76 V. The excitation frequency is 971 Hz and deflection frequency of 485.5Hz.
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsorshipMEMFIS
dc.identifier.doi10.1109/OMEMS.2010.5672163
dc.identifier.isbn9781-4244-8925-1
dc.identifier.linkhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-78751523039anddoi=10.1109%2fOMEMS.2010.5672163andpartnerID=40andmd5=41c9c97b57c7f94d6a853f94fc5642d4
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-78751523039
dc.identifier.urihttp://dx.doi.org/10.1109/OMEMS.2010.5672163
dc.identifier.urihttps://hdl.handle.net/20.500.14288/10396
dc.keywordsDynamic diffraction
dc.keywordsExcitation frequency
dc.keywordsFourier transform infrared spectrometer
dc.keywordsFourier transform spectrometers
dc.keywordsLamellar gratings
dc.keywordsOut-of-plane
dc.keywordsResonant mode
dc.keywordsFourier transform infrared spectroscopy
dc.keywordsMOEMS
dc.keywordsNanophotonics
dc.keywordsSpectrometers
dc.keywordsSpectrometry
dc.keywordsFourier transforms
dc.languageEnglish
dc.publisherIEEE
dc.source2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
dc.subjectElectrical electronics engineering
dc.titleLamellar grating based MEMS fourier transform spectrometer
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authorid0000-0002-2031-7967
local.contributor.authorid0000-0001-7266-2124
local.contributor.authorid0000-0003-3578-0206
local.contributor.authorid0000-0003-1100-8369
local.contributor.kuauthorÜrey, Hakan
local.contributor.kuauthorAyerden, Nadire Pelin
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorSeren, Hüseyin Rahmi
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0

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