Publication: Lamellar grating based MEMS fourier transform spectrometer
Program
KU Authors
Co-Authors
Publication Date
Language
Embargo Status
Journal Title
Journal ISSN
Volume Title
Alternative Title
Abstract
A Lamellar grating interferometer based Fourier Transform Infrared Spectrometer (FTIR) with out-of-plane resonant mode is implemented and characterized. Device has 10mm∧2 clear aperture. Dynamic diffraction grating is comb-actuated and a maximum p-p deflection of 355 μm is obtained at 76 V. The excitation frequency is 971 Hz and deflection frequency of 485.5Hz.
Source
Publisher
IEEE
Subject
Electrical electronics engineering
Citation
Has Part
Source
2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
Book Series Title
Edition
DOI
10.1109/OMEMS.2010.5672163