Publication: Lamellar grating based MEMS fourier transform spectrometer
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Abstract
A Lamellar grating interferometer based Fourier Transform Infrared Spectrometer (FTIR) with out-of-plane resonant mode is implemented and characterized. Device has 10mm∧2 clear aperture. Dynamic diffraction grating is comb-actuated and a maximum p-p deflection of 355 μm is obtained at 76 V. The excitation frequency is 971 Hz and deflection frequency of 485.5Hz.
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IEEE
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Electrical electronics engineering
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2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
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10.1109/OMEMS.2010.5672163
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