Publication:
Vertical resonant comb actuators for fourier transform spectroscopy

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dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorAtaman, Çağlar
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T23:27:07Z
dc.date.issued2006
dc.description.abstractA Fourier Transform Spectrometer is implemented with resonant mode out-of-plane comb actuators which are used as movable diffraction gratings. 106μm deflection is obtained at 28V in ambient pressure at 1.2 KHz for a 3mm clear aperture device.
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.identifier.doi10.1109/omems.2006.1708256
dc.identifier.isbn0780-3956-2X
dc.identifier.isbn9780-7803-9562-6
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-41549122054
dc.identifier.urihttps://IEEExplore.IEEE.org/stamp/stamp.jsp?tp=&arnumber=1708256
dc.identifier.urihttps://hdl.handle.net/20.500.14288/11664
dc.keywordsDiffraction gratings
dc.keywordsFourier transforms
dc.keywordsPressure effects
dc.keywordsAperture devices
dc.keywordsResonant mode
dc.keywordsActuators
dc.language.isoeng
dc.publisherIEEE-Inst Electrical Electronics Engineers Inc
dc.relation.ispartofIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
dc.subjectEngineering
dc.subjectElectrical electronics engineering
dc.titleVertical resonant comb actuators for fourier transform spectroscopy
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorAtaman, Çağlar
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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