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Vertical resonant comb actuators for fourier transform spectroscopy

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dc.contributor.departmentN/A
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorAtaman, Çağlar
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuprofilePhD Student
dc.contributor.kuprofileFaculty Member
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.yokidN/A
dc.contributor.yokid8579
dc.date.accessioned2024-11-09T23:27:07Z
dc.date.issued2006
dc.description.abstractA Fourier Transform Spectrometer is implemented with resonant mode out-of-plane comb actuators which are used as movable diffraction gratings. 106μm deflection is obtained at 28V in ambient pressure at 1.2 KHz for a 3mm clear aperture device.
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.identifier.doi10.1109/omems.2006.1708256
dc.identifier.isbn0780-3956-2X
dc.identifier.isbn9780-7803-9562-6
dc.identifier.linkhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-41549122054&doi=10.1109%2fomems.2006.1708256&partnerID=40&md5=678b294f8732ec9d84288888cf9bff95
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-41549122054
dc.identifier.urihttps://IEEExplore.IEEE.org/stamp/stamp.jsp?tp=&arnumber=1708256
dc.identifier.urihttps://hdl.handle.net/20.500.14288/11664
dc.keywordsDiffraction gratings
dc.keywordsFourier transforms
dc.keywordsPressure effects
dc.keywordsAperture devices
dc.keywordsResonant mode
dc.keywordsActuators
dc.languageEnglish
dc.publisherIEEE-Inst Electrical Electronics Engineers Inc
dc.sourceIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
dc.subjectEngineering
dc.subjectElectrical electronics engineering
dc.titleVertical resonant comb actuators for fourier transform spectroscopy
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authorid0000-0002-6280-8465
local.contributor.authorid0000-0002-2031-7967
local.contributor.kuauthorAtaman, Çağlar
local.contributor.kuauthorÜrey, Hakan
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0

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