Publication:
Vertical resonant comb actuators for fourier transform spectroscopy

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dc.conference.date21 August 2006 - 24 August 2006
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.facultymemberYes
dc.contributor.kuauthorAtaman, Çağlar
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T23:27:07Z
dc.date.issued2006
dc.description.abstractA Fourier Transform Spectrometer is implemented with resonant mode out-of-plane comb actuators which are used as movable diffraction gratings. 106μm deflection is obtained at 28V in ambient pressure at 1.2 KHz for a 3mm clear aperture device.
dc.description.fulltextNo
dc.description.harvestedfromManual
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.peerreviewstatusN/A
dc.description.publisherscopeInternational
dc.description.readpublishN/A
dc.description.sponsoredbyTubitakEuN/A
dc.description.studentonlypublicationNo
dc.description.studentpublicationYes
dc.description.versionN/A
dc.identifier.WoSQuartileN/A
dc.identifier.doi10.1109/omems.2006.1708256
dc.identifier.embargoN/A
dc.identifier.endpage45
dc.identifier.isbn078039562X
dc.identifier.isbn9780780395626
dc.identifier.scopus2-s2.0-41549122054
dc.identifier.startpage44
dc.identifier.urihttps://doi.org/10.1109/OMEMS.2006.1708256
dc.identifier.urihttps://hdl.handle.net/20.500.14288/11664
dc.keywordsDiffraction gratings
dc.keywordsFourier transforms
dc.keywordsPressure effects
dc.keywordsAperture devices
dc.keywordsResonant mode
dc.keywordsActuators
dc.language.isoeng
dc.publisherIEEE-Inst Electrical Electronics Engineers Inc
dc.relation.affiliationKoç University
dc.relation.collectionKoç University Institutional Repository
dc.relation.conferenceIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference
dc.relation.ispartofIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
dc.relation.openaccessN/A
dc.rightsN/A
dc.subjectEngineering
dc.subjectElectrical electronics engineering
dc.titleVertical resonant comb actuators for fourier transform spectroscopy
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorAtaman, Çağlar
local.contributor.kuauthorÜrey, Hakan
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