Torsional MEMS scanner design for high-resolution display systems

Abstract

In scanning display systems, high horizontal and vertical resolution, and high refresh rate requirements translate into large mirror-size scan-angle product and high scanner-frequency requirements. A comparison between published scan-angle mirror-size product values for MEMS scanners and a Steel mechanical scanner is presented. Current performance levels of Steel mechanical scanners are better; however, Silicon MEMS scanners have good material properties and should be able to reach and exceed the performance levels of conventional mechanical scanners. The resolution limitations of mechanical and MEMS scanners are established using dynamic mirror deformation, flexure stress, and other oscillation mode frequencies. Analytical formulas for torsional, vertical deflection mode, lateral deflection mode, and rocking mode natural frequencies are derived using mechanical beam deflection theory.