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Mechanically coupled comb drive MEMS stages

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dc.contributor.coauthorHedsten, Karin
dc.contributor.coauthorEnoksson, Peter
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorResearcher, Arslan, Aslıhan
dc.contributor.kuauthorPhD Student, Ataman, Çağlar
dc.contributor.kuauthorResearcher, Holmstrom, Sven
dc.contributor.kuauthorMaster Student, Seren, Hüseyin Rahmi
dc.contributor.kuauthorFaculty Member, Ürey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-10T00:04:49Z
dc.date.issued2008
dc.description.abstractAn electrostatic large clear-aperture in-plane scanner with a novel actuation principle is presented for fast and large stroke scanning applications. 9 pm resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessNO
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipMC2 access
dc.description.sponsorshipFP6 program
dc.description.sponsorshipTUBITAK(Turkey) [106E068] Partial funding from MC2 access, FP6 program and TUBITAK(Turkey) Grant No: 106E068 are gratefully acknowledged.
dc.identifier.doi10.1109/OMEMS.2008.4607868
dc.identifier.isbn978-1-4244-1917-3
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-54049109712
dc.identifier.urihttps://doi.org/10.1109/OMEMS.2008.4607868
dc.identifier.urihttps://hdl.handle.net/20.500.14288/16341
dc.identifier.wos264556700071
dc.keywordsMechanical coupling
dc.keywordsMEMS stage
dc.keywordsElectrostatic actuation
dc.language.isoeng
dc.publisherIEEE
dc.relation.ispartof2008 IEEE/Leos International Conference on Optical Mems and Nanophotonics
dc.subjectEngineering
dc.subjectElectrical electronic engineering
dc.subjectNanoscience
dc.subjectNanotechnology
dc.subjectOptics
dc.titleMechanically coupled comb drive MEMS stages
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorArslan, Aslıhan
local.contributor.kuauthorAtaman, Çağlar
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorSeren, Hüseyin Rahmi
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1College of Engineering
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
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