Publication:
Mechanically coupled comb drive MEMS stages

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dc.conference.dateAUG 11-14, 2008
dc.conference.locationFreiburg, GERMANY
dc.conference.organizerIEEE/LEOS International Conference on Optical MEMS and Nanophotonics
dc.contributor.coauthorHedsten, Karin
dc.contributor.coauthorEnoksson, Peter
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentOptical Microsystems Laboratory (MEMS)
dc.contributor.facultymemberYes
dc.contributor.kuauthorArslan, Aslıhan
dc.contributor.kuauthorAtaman, Çağlar
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorSeren, Hüseyin Rahmi
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteLaboratory
dc.date.accessioned2024-11-10T00:04:49Z
dc.date.issued2008
dc.description.abstractAn electrostatic large clear-aperture in-plane scanner with a novel actuation principle is presented for fast and large stroke scanning applications. 9 pm resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.
dc.description.fulltextNo
dc.description.harvestedfromManual
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessNO
dc.description.peerreviewstatusN/A
dc.description.publisherscopeInternational
dc.description.readpublishN/A
dc.description.sponsoredbyTubitakEuEU - TÜBİTAK
dc.description.sponsorshipPartial funding from MC2 access, FP6 program and TUBITAK (Turkey) Grant No: 106E068 are gratefully acknowledged.
dc.description.studentonlypublicationNo
dc.description.studentpublicationYes
dc.description.versionN/A
dc.identifier.WoSQuartileN/A
dc.identifier.doi10.1109/OMEMS.2008.4607868
dc.identifier.embargoN/A
dc.identifier.grantno106E068
dc.identifier.isbn9781424419173
dc.identifier.scopus2-s2.0-54049109712
dc.identifier.urihttps://doi.org/10.1109/OMEMS.2008.4607868
dc.identifier.urihttps://hdl.handle.net/20.500.14288/16341
dc.identifier.wos000264556700071
dc.keywordsMechanical coupling
dc.keywordsMEMS stage
dc.keywordsElectrostatic actuation
dc.language.isoeng
dc.publisherInstitute of Electrical and Electronics Engineers
dc.relation.affiliationKoç University
dc.relation.collectionKoç University Institutional Repository
dc.relation.ispartof2008 IEEE/Leos International Conference on Optical Mems and Nanophotonics
dc.relation.openaccessN/A
dc.rightsN/A
dc.subjectEngineering
dc.subjectElectrical electronic engineering
dc.subjectNanoscience
dc.subjectNanotechnology
dc.subjectOptics
dc.titleMechanically coupled comb drive MEMS stages
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorArslan, Aslıhan
local.contributor.kuauthorAtaman, Çağlar
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorSeren, Hüseyin Rahmi
local.contributor.kuauthorÜrey, Hakan
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