Publication: Mechanically coupled comb drive MEMS stages
Program
KU Authors
Co-Authors
Hedsten, Karin
Enoksson, Peter
Advisor
Publication Date
2008
Language
English
Type
Conference proceeding
Journal Title
Journal ISSN
Volume Title
Abstract
An electrostatic large clear-aperture in-plane scanner with a novel actuation principle is presented for fast and large stroke scanning applications. 9 pm resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.
Description
Source:
2008 IEEE/Leos International Conference on Optical Mems and Nanophotonics
Publisher:
IEEE
Keywords:
Subject
Engineering, Electrical electronic engineering, Nanoscience, Nanotechnology, Optics