Publication: Mechanically coupled comb drive MEMS stages
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Program
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Co-Authors
Hedsten, Karin
Enoksson, Peter
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Abstract
An electrostatic large clear-aperture in-plane scanner with a novel actuation principle is presented for fast and large stroke scanning applications. 9 pm resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.
Source
Publisher
Institute of Electrical and Electronics Engineers
Subject
Citation
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Source
2008 IEEE/Leos International Conference on Optical Mems and Nanophotonics
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DOI
10.1109/OMEMS.2008.4607868
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