Publication: Mechanically coupled comb drive MEMS stages
Program
KU Authors
Co-Authors
Hedsten, Karin
Enoksson, Peter
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N/A
Journal Title
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Abstract
An electrostatic large clear-aperture in-plane scanner with a novel actuation principle is presented for fast and large stroke scanning applications. 9 pm resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.
Source
Publisher
Institute of Electrical and Electronics Engineers
Subject
Engineering, Electrical electronic engineering, Nanoscience, Nanotechnology, Optics
Citation
Has Part
Source
2008 IEEE/Leos International Conference on Optical Mems and Nanophotonics
Book Series Title
Edition
DOI
10.1109/OMEMS.2008.4607868
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