Publication: Mechanically coupled comb drive MEMS stages
Program
KU Authors
Co-Authors
Hedsten, Karin
Enoksson, Peter
Publication Date
Language
Embargo Status
Journal Title
Journal ISSN
Volume Title
Alternative Title
Abstract
An electrostatic large clear-aperture in-plane scanner with a novel actuation principle is presented for fast and large stroke scanning applications. 9 pm resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.
Source
Publisher
IEEE
Subject
Engineering, Electrical electronic engineering, Nanoscience, Nanotechnology, Optics
Citation
Has Part
Source
2008 IEEE/Leos International Conference on Optical Mems and Nanophotonics
Book Series Title
Edition
DOI
10.1109/OMEMS.2008.4607868