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2D scanning MEMS stage integrated with microlens arrays for high-resolution beam steering

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dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentN/A
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentN/A
dc.contributor.departmentN/A
dc.contributor.departmentN/A
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuauthorGökçe, Sertan Kutal
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorArslan, Aslıhan
dc.contributor.kuauthorAtaman, Çağlar
dc.contributor.kuauthorSeren, Hüseyin Rahmi
dc.contributor.kuprofileFaculty Member
dc.contributor.kuprofileMaster Student
dc.contributor.kuprofileResearcher
dc.contributor.kuprofileMaster Student
dc.contributor.kuprofilePhD Student
dc.contributor.kuprofileMaster Student
dc.contributor.kuprofileOther
dc.contributor.otherDepartment of Electrical and Electronics Engineering
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.schoolcollegeinstituteN/A
dc.contributor.yokid8579
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.date.accessioned2024-11-09T22:45:36Z
dc.date.issued2009
dc.description.abstractA novel MEMS stage using one set of comb fingers, capable of 2-axis motion is designed and developed. With an integrated 1.1mm square microlens-array it deflects 40um in-plane at 60V and 95um out-of-plane at 100V.
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.identifier.doi10.1109/OMEMS.2009.5338606
dc.identifier.isbn9781-4244-2382-8
dc.identifier.linkhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-71749104555anddoi=10.1109%2fOMEMS.2009.5338606andpartnerID=40andmd5=28f04a5fb4e2957df3c47fe17f78c9b6
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-71749104555
dc.identifier.urihttp://dx.doi.org/10.1109/OMEMS.2009.5338606
dc.identifier.urihttps://hdl.handle.net/20.500.14288/6127
dc.keywordsBeam steering
dc.keywordsComb drive
dc.keywordsHybrid integration 2D scanning
dc.keywordsBeam-steering
dc.keywordsComb drive
dc.keywordsComb fingers
dc.keywordsHigh resolution
dc.keywordsHybrid integration
dc.keywordsIn-plane
dc.keywordsMEMS stage
dc.keywordsMicro-lens
dc.keywordsMicro-lens arrays
dc.keywordsOut-of-plane
dc.keywordsMEMS
dc.keywordsMicroelectromechanical devices
dc.keywordsMicrolenses
dc.keywordsMicrooptics
dc.keywordsNanophotonics
dc.keywordsPhotonics
dc.languageEnglish
dc.publisherIEEE
dc.source2009 IEEE Leos International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
dc.subjectElectrical electronics engineering
dc.title2D scanning MEMS stage integrated with microlens arrays for high-resolution beam steering
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authorid0000-0002-2031-7967
local.contributor.authoridN/A
local.contributor.authorid0000-0003-3578-0206
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local.contributor.authorid0000-0002-6280-8465
local.contributor.authorid0000-0003-1100-8369
local.contributor.authoridN/A
local.contributor.kuauthorÜrey, Hakan
local.contributor.kuauthorGökçe, Sertan Kutal
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorArslan, Aslıhan
local.contributor.kuauthorAtaman, Çağlar
local.contributor.kuauthorSeren, Hüseyin Rahmi
local.contributor.kuauthorHibert, Cyrille
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0

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