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A built-in vibration sensor using ARC-discharged reactive ion plated PZT

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dc.contributor.coauthorTani, Masanao
dc.contributor.coauthorAkamatsu, Masahiro
dc.contributor.coauthorYasuda, Yoshiaki
dc.contributor.coauthorFujita, Hiroyuk
dc.contributor.coauthorToshiyoshi, Hiroshi
dc.contributor.departmentN/A
dc.contributor.kuauthorBaran, Utku
dc.contributor.kuprofileMaster Student
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.yokidN/A
dc.date.accessioned2024-11-09T23:30:26Z
dc.date.issued2011
dc.description.abstractA piezoelectrically excited micro cantilever with multiple electrode ports has been developed as a standard test device to investigate the piezoelectric oscillation sensing capability. A 5 μm thick PZT was deposited by the arc-discharge reactive ion plating on a 20-μm-thick and 2700-μm-long SOI cantilever, and its piezoelectrically measured vibration signal was correlated with the reference oscillation signal from the laser Doppler vibrometer to prove the feasibility as oscillation detector. An equivalent circuit expression for the sensing electrode has been found.
dc.description.indexedbyScopus
dc.description.issue3
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.volume131
dc.identifier.doi10.1541/ieejsmas.131.128
dc.identifier.issn1341-8939
dc.identifier.linkhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-80052405124anddoi=10.1541%2fieejsmas.131.128andpartnerID=40andmd5=d2d01f3574cad6b863893c589c980f0a
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-80052405124
dc.identifier.urihttp://dx.doi.org/10.1541/ieejsmas.131.128
dc.identifier.urihttps://hdl.handle.net/20.500.14288/12238
dc.keywordsCantilever
dc.keywordsPiezoelectric
dc.keywordsPZT
dc.keywordsVibration sensor Arc discharge
dc.keywordsCantilever
dc.keywordsLaser Doppler vibrometers
dc.keywordsMicro-cantilevers
dc.keywordsMultiple electrodes
dc.keywordsOscillation signals
dc.keywordsPiezoelectric
dc.keywordsPZT
dc.keywordsReactive ion
dc.keywordsReactive ion plating
dc.keywordsSensing electrode
dc.keywordsStandard tests
dc.keywordsVibration sensor
dc.keywordsVibration sensors
dc.keywordsVibration signal
dc.keywordsElectric discharges
dc.keywordsIon implantation
dc.keywordsNanocantilevers
dc.keywordsPiezoelectricity
dc.keywordsSensors
dc.keywordsVentilation exhausts
dc.languageEnglish
dc.publisherThe Institute of Electrical Engineers of Japan
dc.sourceIEEJ Transactions on Sensors and Micromachines
dc.subjectEngineering
dc.titleA built-in vibration sensor using ARC-discharged reactive ion plated PZT
dc.typeJournal Article
dspace.entity.typePublication
local.contributor.authorid0000-0002-7740-4252
local.contributor.kuauthorBaran, Utku

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