Publication: A built-in vibration sensor using ARC-discharged reactive ion plated PZT
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Tani, Masanao
Akamatsu, Masahiro
Yasuda, Yoshiaki
Fujita, Hiroyuk
Toshiyoshi, Hiroshi
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Abstract
A piezoelectrically excited micro cantilever with multiple electrode ports has been developed as a standard test device to investigate the piezoelectric oscillation sensing capability. A 5 μm thick PZT was deposited by the arc-discharge reactive ion plating on a 20-μm-thick and 2700-μm-long SOI cantilever, and its piezoelectrically measured vibration signal was correlated with the reference oscillation signal from the laser Doppler vibrometer to prove the feasibility as oscillation detector. An equivalent circuit expression for the sensing electrode has been found.
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The Institute of Electrical Engineers of Japan
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IEEJ Transactions on Sensors and Micromachines
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DOI
10.1541/ieejsmas.131.128
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