Publication: A built-in vibration sensor using ARC-discharged reactive ion plated PZT
Program
KU-Authors
KU Authors
Co-Authors
Tani, Masanao
Akamatsu, Masahiro
Yasuda, Yoshiaki
Fujita, Hiroyuk
Toshiyoshi, Hiroshi
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Abstract
A piezoelectrically excited micro cantilever with multiple electrode ports has been developed as a standard test device to investigate the piezoelectric oscillation sensing capability. A 5 μm thick PZT was deposited by the arc-discharge reactive ion plating on a 20-μm-thick and 2700-μm-long SOI cantilever, and its piezoelectrically measured vibration signal was correlated with the reference oscillation signal from the laser Doppler vibrometer to prove the feasibility as oscillation detector. An equivalent circuit expression for the sensing electrode has been found.
Source
Publisher
The Institute of Electrical Engineers of Japan
Subject
Engineering
Citation
Has Part
Source
IEEJ Transactions on Sensors and Micromachines
Book Series Title
Edition
DOI
10.1541/ieejsmas.131.128
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