Publication: Simultaneous two-wavelength readout for thermo-mechanical MEMS detectors
Program
KU Authors
Co-Authors
Ferhanoğlu, Onur
Torun, Hamdi
Advisor
Publication Date
2014
Language
English
Type
Conference proceeding
Journal Title
Journal ISSN
Volume Title
Abstract
We proposed a novel two-wavelength optical readout for grating based thenno-mechanical MEMS arrays by using two color LEDS butt-coupled to a multi-mode fiber, which provides spatial auto-registration of two different color images on a single camera. The -1st diffraction orders of the different colors are simultaneously monitored with different channels (R and G) of the RGB camera. The sensitivity of the MEMS array is improved by using the channel data with higher sensitivity for each MEMS detector under a thermal load.
Description
Source:
2014 International Conference on Optical Mems and Nanophotonics (Omn)
Publisher:
IEEE
Keywords:
Subject
Engineering, electrical and electronic, Nanoscience, Nanotechnology