Publication: Simultaneous two-wavelength readout for thermo-mechanical MEMS detectors
Program
KU Authors
Co-Authors
Ferhanoğlu, Onur
Torun, Hamdi
Publication Date
Language
Embargo Status
Journal Title
Journal ISSN
Volume Title
Alternative Title
Simultaneous two-wavelength readout for ther1vio-mechanical mems detectors
Abstract
We proposed a novel two-wavelength optical readout for grating based thenno-mechanical MEMS arrays by using two color LEDS butt-coupled to a multi-mode fiber, which provides spatial auto-registration of two different color images on a single camera. The -1st diffraction orders of the different colors are simultaneously monitored with different channels (R and G) of the RGB camera. The sensitivity of the MEMS array is improved by using the channel data with higher sensitivity for each MEMS detector under a thermal load.
Source
Publisher
IEEE
Subject
Engineering, electrical and electronic, Nanoscience, Nanotechnology
Citation
Has Part
Source
2014 International Conference on Optical Mems and Nanophotonics (Omn)
Book Series Title
Edition
DOI
10.1109/OMN.2014.6924576