Publication:
Simultaneous two-wavelength readout for thermo-mechanical MEMS detectors

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KU Authors

Co-Authors

Ferhanoğlu, Onur
Torun, Hamdi

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Publication Date

2014

Language

English

Type

Conference proceeding

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Abstract

We proposed a novel two-wavelength optical readout for grating based thenno-mechanical MEMS arrays by using two color LEDS butt-coupled to a multi-mode fiber, which provides spatial auto-registration of two different color images on a single camera. The -1st diffraction orders of the different colors are simultaneously monitored with different channels (R and G) of the RGB camera. The sensitivity of the MEMS array is improved by using the channel data with higher sensitivity for each MEMS detector under a thermal load.

Description

Source:

2014 International Conference on Optical Mems and Nanophotonics (Omn)

Publisher:

IEEE

Keywords:

Subject

Engineering, electrical and electronic, Nanoscience, Nanotechnology

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