Publication:
Resonant PZT MEMS scanners with integrated angle sensors

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dc.contributor.coauthorBrown, Dean
dc.contributor.coauthorDavis, Wyatt
dc.contributor.departmentN/A
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentN/A
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorBaran, Utku
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorÇakmak, Onur
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuprofileMaster Student
dc.contributor.kuprofileResearcher
dc.contributor.kuprofilePhD Student
dc.contributor.kuprofileFaculty Member
dc.contributor.otherDepartment of Electrical and Electronics Engineering
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokid8579
dc.date.accessioned2024-11-10T00:10:22Z
dc.date.issued2014
dc.description.abstractSeveral high performing PZT-actuated MEMS laser scanners utilizing mechanical coupling are designed, fabricated, and characterized. Optical angles up to 59.3 deg. and θoptD·fn-products up to 3052 deg.·mm·Hz are demonstrated. These are the highest performing MEMS scanners in the literature. An angle sensor is integrated into one scanner design without any additional processing. The sensor response shows a linear relationship with the mirror rotation. A closed-loop drive was demonstrated using the scanner output.
dc.description.indexedbyWoS
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsorshipCity of Glasgow Lord Provost's Office
dc.description.sponsorshipet al.
dc.description.sponsorshipGlasgow City Marketing Bureau
dc.description.sponsorshipManey Publishing
dc.description.sponsorshipUniversity of Strathclyde Centre for Microsystems and Photonics
dc.description.sponsorshipUniversity of Strathclyde Faculty of Engineering
dc.identifier.doi10.1109/OMN.2014.6924612
dc.identifier.isbn9780-9928-4142-3
dc.identifier.issn2160-5033
dc.identifier.linkhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-84908020682&doi=10.1109%2fOMN.2014.6924612&partnerID=40&md5=c2017edf8b08e22e8651906e43c8b6d8
dc.identifier.scopus2-s2.0-84908020682
dc.identifier.urihttp://dx.doi.org/10.1109/OMN.2014.6924612
dc.identifier.urihttps://hdl.handle.net/20.500.14288/17272
dc.identifier.wos366524800050
dc.keywordsMOEMS
dc.keywordsNanophotonics
dc.keywordsAngle sensors
dc.keywordsClosed loop drives
dc.keywordsLaser scanner
dc.keywordsLinear relationships
dc.keywordsMechanical coupling
dc.keywordsOptical angle
dc.keywordsScanner designs
dc.keywordsSensor response
dc.keywordsScanning
dc.languageEnglish
dc.publisherIEEE Computer Society
dc.sourceInternational Conference on Optical MEMS and Nanophotonics
dc.subjectEngineering
dc.subjectElectrical electronic engineering
dc.subjectNanoscience
dc.subjectNanotechnology
dc.titleResonant PZT MEMS scanners with integrated angle sensors
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authorid0000-0002-7740-4252
local.contributor.authorid0000-0003-3578-0206
local.contributor.authorid0000-0003-0635-7169
local.contributor.authorid0000-0002-2031-7967
local.contributor.kuauthorBaran, Utku
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorÇakmak, Onur
local.contributor.kuauthorÜrey, Hakan
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0

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