Publication: Resonant PZT MEMS scanners with integrated angle sensors
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KU Authors
Co-Authors
Brown, Dean
Davis, Wyatt
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N/A
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Abstract
Several high performing PZT-actuated MEMS laser scanners utilizing mechanical coupling are designed, fabricated, and characterized. Optical angles up to 59.3 deg. and θoptD·fn-products up to 3052 deg.·mm·Hz are demonstrated. These are the highest performing MEMS scanners in the literature. An angle sensor is integrated into one scanner design without any additional processing. The sensor response shows a linear relationship with the mirror rotation. A closed-loop drive was demonstrated using the scanner output.
Source
Publisher
IEEE Computer Society
Subject
Engineering, Electrical electronic engineering, Nanoscience, Nanotechnology
Citation
Has Part
Source
International Conference on Optical MEMS and Nanophotonics
Book Series Title
Edition
DOI
10.1109/OMN.2014.6924612
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