Publication: Resonant PZT MEMS scanners with integrated angle sensors
Program
KU Authors
Co-Authors
Brown, Dean
Davis, Wyatt
Advisor
Publication Date
2014
Language
English
Type
Conference proceeding
Journal Title
Journal ISSN
Volume Title
Abstract
Several high performing PZT-actuated MEMS laser scanners utilizing mechanical coupling are designed, fabricated, and characterized. Optical angles up to 59.3 deg. and θoptD·fn-products up to 3052 deg.·mm·Hz are demonstrated. These are the highest performing MEMS scanners in the literature. An angle sensor is integrated into one scanner design without any additional processing. The sensor response shows a linear relationship with the mirror rotation. A closed-loop drive was demonstrated using the scanner output.
Description
Source:
International Conference on Optical MEMS and Nanophotonics
Publisher:
IEEE Computer Society
Keywords:
Subject
Engineering, Electrical electronic engineering, Nanoscience, Nanotechnology