Publication:
Uncooled infrared thermo-mechanical detector array: design, fabrication and testing

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dc.contributor.coauthorTorun, Hamdi
dc.contributor.departmentN/A
dc.contributor.departmentN/A
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorToy, Muhammed Fatih
dc.contributor.kuauthorFerhanoğlu, Onur
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuprofileMaster Student
dc.contributor.kuprofilePhD Student
dc.contributor.kuprofileFaculty Member
dc.contributor.otherDepartment of Electrical and Electronics Engineering
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.yokidN/A
dc.contributor.yokid205198
dc.contributor.yokid8579
dc.date.accessioned2024-11-09T22:56:53Z
dc.date.issued2009
dc.description.abstractThermo-mechanical detector arrays in the 160 x 120 array format are designed, fabricated, and tested. Detectors are composed of SiNx and TiN as absorbing layer, Al to form bimaterial legs, and integrated diffraction grating interferometer underneath each detector. The detector array is a passive component and the optical readout is performed remotely with a laser and CCD camera. All noise sources are considered in making a detailed noise equivalent temperature difference (NETD) estimation, which revealed <30mK NETD is achievable using >12-bit CCD camera for the readout.
dc.description.indexedbyWoS
dc.description.indexedbyScopus
dc.description.issue1
dc.description.openaccessNO
dc.description.volume156
dc.identifier.doi10.1016/j.sna.2009.02.010
dc.identifier.issn0924-4247
dc.identifier.scopus2-s2.0-69949164012
dc.identifier.urihttp://dx.doi.org/10.1016/j.sna.2009.02.010
dc.identifier.urihttps://hdl.handle.net/20.500.14288/7459
dc.identifier.wos272636100014
dc.keywordsThermal detector
dc.keywordsNETD
dc.keywordsOptical readout
dc.keywordsDiffraction grating
dc.keywordsCCD camera
dc.languageEnglish
dc.publisherElsevier Science Sa
dc.sourceSensors And Actuators A-Physical
dc.subjectElectrical electronics engineering
dc.subjectPhysical instruments
dc.titleUncooled infrared thermo-mechanical detector array: design, fabrication and testing
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authorid0000-0003-0176-8807
local.contributor.authorid0000-0002-5381-533X
local.contributor.authorid0000-0002-2031-7967
local.contributor.kuauthorToy, Muhammed Fatih
local.contributor.kuauthorFerhanoğlu, Onur
local.contributor.kuauthorÜrey, Hakan
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0

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