Publication:
Uncooled infrared thermo-mechanical detector array: design, fabrication and testing

Placeholder

School / College / Institute

Organizational Unit

Program

KU Authors

Co-Authors

Torun, Hamdi

Publication Date

Language

Embargo Status

Journal Title

Journal ISSN

Volume Title

Alternative Title

Abstract

Thermo-mechanical detector arrays in the 160 x 120 array format are designed, fabricated, and tested. Detectors are composed of SiNx and TiN as absorbing layer, Al to form bimaterial legs, and integrated diffraction grating interferometer underneath each detector. The detector array is a passive component and the optical readout is performed remotely with a laser and CCD camera. All noise sources are considered in making a detailed noise equivalent temperature difference (NETD) estimation, which revealed <30mK NETD is achievable using >12-bit CCD camera for the readout.

Source

Publisher

Elsevier Science Sa

Subject

Electrical electronics engineering, Physical instruments

Citation

Has Part

Source

Sensors And Actuators A-Physical

Book Series Title

Edition

DOI

10.1016/j.sna.2009.02.010

item.page.datauri

Link

Rights

Copyrights Note

Endorsement

Review

Supplemented By

Referenced By

0

Views

0

Downloads

View PlumX Details