Publication: Uncooled infrared thermo-mechanical detector array: design, fabrication and testing
Program
KU Authors
Co-Authors
Torun, Hamdi
Publication Date
Language
Embargo Status
Journal Title
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Volume Title
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Abstract
Thermo-mechanical detector arrays in the 160 x 120 array format are designed, fabricated, and tested. Detectors are composed of SiNx and TiN as absorbing layer, Al to form bimaterial legs, and integrated diffraction grating interferometer underneath each detector. The detector array is a passive component and the optical readout is performed remotely with a laser and CCD camera. All noise sources are considered in making a detailed noise equivalent temperature difference (NETD) estimation, which revealed <30mK NETD is achievable using >12-bit CCD camera for the readout.
Source
Publisher
Elsevier Science Sa
Subject
Electrical electronics engineering, Physical instruments
Citation
Has Part
Source
Sensors And Actuators A-Physical
Book Series Title
Edition
DOI
10.1016/j.sna.2009.02.010