Publication:
High frequency torsional mems scanner for displays

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dc.contributor.coauthorBrown D.
dc.contributor.coauthorBalma D.
dc.contributor.coauthorDavis W.O.
dc.contributor.coauthorMazzalai A.
dc.contributor.coauthorMuralt P.
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorBaran, Utku
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T23:35:38Z
dc.date.issued2012
dc.description.abstractA high frequency resonant torsional microscanner actuated with thin film PZT is modeled, fabricated, and characterized. Sinusoidal actuation with 24 V at a mechanical resonance frequency of 39870 Hz provides a total optical scan angle of 38.5 deg. for the 1.4 mm wide mirror. It provides significant power and size advantages compared to electromagnetically and electrostatically actuated scanners. This scanner is a significant step towards achieving full HD resolution with mobile laser projectors.
dc.description.indexedbyScopus
dc.description.indexedbyWOS
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipRobotics and Automation Society
dc.description.sponsorshipIEEE
dc.description.sponsorshipRegion Nord-Pas de Calais
dc.identifier.doi10.1109/MEMSYS.2012.6170191
dc.identifier.isbn9781-4673-0324-8
dc.identifier.issn1084-6999
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-84860467208
dc.identifier.urihttps://doi.org/10.1109/MEMSYS.2012.6170191
dc.identifier.urihttps://hdl.handle.net/20.500.14288/12534
dc.identifier.wos312912800160
dc.keywordsFull hd
dc.keywordsHigh frequency
dc.keywordsLaser projectors
dc.keywordsMechanical resonance frequency
dc.keywordsMEMS scanner
dc.keywordsMicroscanner
dc.keywordsPZT
dc.keywordsScan angle
dc.keywordsElectrostatic actuators
dc.keywordsMEMS
dc.keywordsScanning
dc.language.isoeng
dc.publisherIEEE
dc.relation.ispartofProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
dc.subjectElectrical electronics engineering
dc.titleHigh frequency torsional mems scanner for displays
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorÜrey, Hakan
local.contributor.kuauthorBaran, Utku
local.contributor.kuauthorHolmstrom, Sven
local.publication.orgunit1College of Engineering
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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relation.isOrgUnitOfPublication3fc31c89-e803-4eb1-af6b-6258bc42c3d8
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
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relation.isParentOrgUnitOfPublication.latestForDiscovery8e756b23-2d4a-4ce8-b1b3-62c794a8c164

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