Publication: High frequency torsional mems scanner for displays
Program
KU-Authors
KU Authors
Co-Authors
Brown D.
Balma D.
Davis W.O.
Mazzalai A.
Muralt P.
Publication Date
Language
Embargo Status
Journal Title
Journal ISSN
Volume Title
Alternative Title
Abstract
A high frequency resonant torsional microscanner actuated with thin film PZT is modeled, fabricated, and characterized. Sinusoidal actuation with 24 V at a mechanical resonance frequency of 39870 Hz provides a total optical scan angle of 38.5 deg. for the 1.4 mm wide mirror. It provides significant power and size advantages compared to electromagnetically and electrostatically actuated scanners. This scanner is a significant step towards achieving full HD resolution with mobile laser projectors.
Source
Publisher
IEEE
Subject
Electrical electronics engineering
Citation
Has Part
Source
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Book Series Title
Edition
DOI
10.1109/MEMSYS.2012.6170191