Publication: High frequency torsional mems scanner for displays
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Brown D.
Balma D.
Davis W.O.
Mazzalai A.
Muralt P.
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Abstract
A high frequency resonant torsional microscanner actuated with thin film PZT is modeled, fabricated, and characterized. Sinusoidal actuation with 24 V at a mechanical resonance frequency of 39870 Hz provides a total optical scan angle of 38.5 deg. for the 1.4 mm wide mirror. It provides significant power and size advantages compared to electromagnetically and electrostatically actuated scanners. This scanner is a significant step towards achieving full HD resolution with mobile laser projectors.
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IEEE
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Source
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
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DOI
10.1109/MEMSYS.2012.6170191
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