Publication: High frequency torsional mems scanner for displays
Program
KU-Authors
KU Authors
Co-Authors
Brown D.
Balma D.
Davis W.O.
Mazzalai A.
Muralt P.
Advisor
Publication Date
Language
English
Journal Title
Journal ISSN
Volume Title
Abstract
A high frequency resonant torsional microscanner actuated with thin film PZT is modeled, fabricated, and characterized. Sinusoidal actuation with 24 V at a mechanical resonance frequency of 39870 Hz provides a total optical scan angle of 38.5 deg. for the 1.4 mm wide mirror. It provides significant power and size advantages compared to electromagnetically and electrostatically actuated scanners. This scanner is a significant step towards achieving full HD resolution with mobile laser projectors.
Source:
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publisher:
IEEE
Keywords:
Subject
Electrical electronics engineering