Publication: Monolithic fabrication of silicon nanowires bridging thick silicon structures
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KU-Authors
KU Authors
Co-Authors
Peric, O.
Sacchetto, D.
Fantner, G.E.
Leblebici, Y.
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NO
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Abstract
A monolithic process is developed for the fabrication of Si nanowires within thick Si substrates. A combination of anisotropic etch and sidewall passivation is utilized to protect and release Si lines during the subsequent deep etch. An etch depth of 10 μm is demonstrated with a future prospect for 50 μm opening up new possibilities for the deterministic integration of nanowires with microsystems. Nanowires with in-plane dimensions as low as 20 nm and aspect ratios up to 150 are obtained. Nanomechanical characterization through bending tests further confirms structural integrity of the connection between nanowires and anchoring Si microstructures.
Source
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Multidisciplinary engineering, Mathematics
Citation
Has Part
Source
IEEE Nanotechnology Express
Book Series Title
Edition
DOI
10.1109/XNANO.2015.2469312