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MEMS fourier transform IR spectrometer

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dc.contributor.coauthorSandner, Thilo
dc.contributor.coauthorLuettjohann, Stephan
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorAyerden, Nadire Pelin
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorÖlçer, Selim
dc.contributor.kuauthorSeren, Hüseyin Rahmi
dc.contributor.kuauthorSharma, Jaibir
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T23:03:47Z
dc.date.issued2011
dc.description.abstractA comb-actuated MEMS lamellar grating FTIR spectrometer with maximum OPD of 652μm and clear aperture area of 9.6mm2 is developed. Laser and IR interferograms in 2.5-16μm wavelength band are acquired at ambient pressure.
dc.description.indexedbyScopus
dc.description.indexedbyWOS
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipASELSAN Corp.
dc.identifier.doi10.1109/OMEMS.2011.6031021
dc.identifier.isbn9781-4577-0336-2
dc.identifier.issn2160-5033
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-82955205836
dc.identifier.urihttps://doi.org/10.1109/OMEMS.2011.6031021
dc.identifier.urihttps://hdl.handle.net/20.500.14288/8527
dc.identifier.wos297850100004
dc.keywordsFourier transform spectroscopy
dc.keywordsIR
dc.keywordslamellar grating
dc.keywordsMEMS Ambient pressures
dc.keywordsAperture area
dc.keywordsFourier Transform spectroscopy
dc.keywordsFT-IR-spectrometers
dc.keywordsInterferograms
dc.keywordsLamellar gratings
dc.keywordsWavelength band
dc.keywordsIridium
dc.keywordsMEMS
dc.keywordsMOEMS
dc.keywordsNanophotonics
dc.keywordsSpectrometry
dc.keywordsSpectroscopy
dc.keywordsSpectrometers
dc.language.isoeng
dc.publisherIEEE
dc.relation.ispartofInternational Conference on Optical MEMS and Nanophotonics
dc.subjectElectrical electronics engineering
dc.titleMEMS fourier transform IR spectrometer
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorÜrey, Hakan
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorÖlçer, Selim
local.contributor.kuauthorSeren, Hüseyin Rahmi
local.contributor.kuauthorSharma, Jaibir
local.contributor.kuauthorAyerden, Nadire Pelin
local.publication.orgunit1College of Engineering
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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