Publication:
MEMS fourier transform IR spectrometer

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dc.contributor.coauthorSandner, Thilo
dc.contributor.coauthorLuettjohann, Stephan
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentN/A
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentN/A
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorÖlçer, Selim
dc.contributor.kuauthorSeren, Hüseyin Rahmi
dc.contributor.kuauthorSharma, Jaibir
dc.contributor.kuauthorAyerden, Nadire Pelin
dc.contributor.kuprofileFaculty Member
dc.contributor.kuprofileResearcher
dc.contributor.kuprofileOther
dc.contributor.kuprofileMaster Student
dc.contributor.kuprofileResearcher
dc.contributor.kuprofileMaster Student
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.yokid8579
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.date.accessioned2024-11-09T23:03:47Z
dc.date.issued2011
dc.description.abstractA comb-actuated MEMS lamellar grating FTIR spectrometer with maximum OPD of 652μm and clear aperture area of 9.6mm2 is developed. Laser and IR interferograms in 2.5-16μm wavelength band are acquired at ambient pressure.
dc.description.indexedbyScopus
dc.description.indexedbyWoS
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsorshipASELSAN Corp.
dc.identifier.doi10.1109/OMEMS.2011.6031021
dc.identifier.isbn9781-4577-0336-2
dc.identifier.issn2160-5033
dc.identifier.linkhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-82955205836anddoi=10.1109%2fOMEMS.2011.6031021andpartnerID=40andmd5=fd12822170c6accda4b11c163a09d6bc
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-82955205836
dc.identifier.urihttp://dx.doi.org/10.1109/OMEMS.2011.6031021
dc.identifier.urihttps://hdl.handle.net/20.500.14288/8527
dc.identifier.wos297850100004
dc.keywordsFourier transform spectroscopy
dc.keywordsIR
dc.keywordslamellar grating
dc.keywordsMEMS Ambient pressures
dc.keywordsAperture area
dc.keywordsFourier Transform spectroscopy
dc.keywordsFT-IR-spectrometers
dc.keywordsInterferograms
dc.keywordsLamellar gratings
dc.keywordsWavelength band
dc.keywordsIridium
dc.keywordsMEMS
dc.keywordsMOEMS
dc.keywordsNanophotonics
dc.keywordsSpectrometry
dc.keywordsSpectroscopy
dc.keywordsSpectrometers
dc.languageEnglish
dc.publisherIEEE
dc.sourceInternational Conference on Optical MEMS and Nanophotonics
dc.subjectElectrical electronics engineering
dc.titleMEMS fourier transform IR spectrometer
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authorid0000-0002-2031-7967
local.contributor.authorid0000-0003-3578-0206
local.contributor.authorid0000-0002-8270-7055
local.contributor.authorid0000-0003-1100-8369
local.contributor.authorid0000-0001-5166-0015
local.contributor.authorid0000-0001-7266-2124
local.contributor.kuauthorÜrey, Hakan
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorÖlçer, Selim
local.contributor.kuauthorSeren, Hüseyin Rahmi
local.contributor.kuauthorSharma, Jaibir
local.contributor.kuauthorAyerden, Nadire Pelin
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0

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