Publication: MEMS fourier transform IR spectrometer
Program
KU Authors
Co-Authors
Sandner, Thilo
Luettjohann, Stephan
Advisor
Publication Date
Language
English
Journal Title
Journal ISSN
Volume Title
Abstract
A comb-actuated MEMS lamellar grating FTIR spectrometer with maximum OPD of 652μm and clear aperture area of 9.6mm2 is developed. Laser and IR interferograms in 2.5-16μm wavelength band are acquired at ambient pressure.
Description
Source:
International Conference on Optical MEMS and Nanophotonics
Publisher:
IEEE
Keywords:
Subject
Electrical electronics engineering