Publication: MEMS fourier transform IR spectrometer
Program
KU Authors
Co-Authors
Sandner, Thilo
Luettjohann, Stephan
Publication Date
Language
Embargo Status
Journal Title
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Volume Title
Alternative Title
Abstract
A comb-actuated MEMS lamellar grating FTIR spectrometer with maximum OPD of 652μm and clear aperture area of 9.6mm2 is developed. Laser and IR interferograms in 2.5-16μm wavelength band are acquired at ambient pressure.
Source
Publisher
IEEE
Subject
Electrical electronics engineering
Citation
Has Part
Source
International Conference on Optical MEMS and Nanophotonics
Book Series Title
Edition
DOI
10.1109/OMEMS.2011.6031021