Publication:
MEMS fourier transform IR spectrometer

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Sandner, Thilo
Luettjohann, Stephan

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English

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Abstract

A comb-actuated MEMS lamellar grating FTIR spectrometer with maximum OPD of 652μm and clear aperture area of 9.6mm2 is developed. Laser and IR interferograms in 2.5-16μm wavelength band are acquired at ambient pressure.

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Source:

International Conference on Optical MEMS and Nanophotonics

Publisher:

IEEE

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Subject

Electrical electronics engineering

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