Publication: Comb- actuated resonant torsional scanner for microdisplays
Program
KU Authors
Co-Authors
Advisor
Publication Date
2009
Language
English
Type
Conference proceeding
Journal Title
Journal ISSN
Volume Title
Abstract
A comb-actuated 1D torsional MEMS scanner is developed for high resolution projection display systems using mechanical coupling principle. 64° TOSA (total optical scan angle) is achieved at 22.1 kHz with 170 V peak-to-peak excitation voltages.
Description
Source:
2009 IEEE Leos International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Publisher:
IEEE
Keywords:
Subject
Electrical electronics engineering