Publication: Comb- actuated resonant torsional scanner for microdisplays
Program
KU Authors
Co-Authors
Publication Date
Language
Embargo Status
Journal Title
Journal ISSN
Volume Title
Alternative Title
Abstract
A comb-actuated 1D torsional MEMS scanner is developed for high resolution projection display systems using mechanical coupling principle. 64° TOSA (total optical scan angle) is achieved at 22.1 kHz with 170 V peak-to-peak excitation voltages.
Source
Publisher
IEEE
Subject
Electrical electronics engineering
Citation
Has Part
Source
2009 IEEE Leos International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Book Series Title
Edition
DOI
10.1109/OMEMS.2009.5338540