Publication: Comb- actuated resonant torsional scanner for microdisplays
Loading...
Program
Organization Authors
Co-Authors
Date
Language
Embargo Status
N/A
Journal Title
Journal ISSN
Volume Title
Alternative Title
Abstract
A comb-actuated 1D torsional MEMS scanner is developed for high resolution projection display systems using mechanical coupling principle. 64° TOSA (total optical scan angle) is achieved at 22.1 kHz with 170 V peak-to-peak excitation voltages.
Source
Publisher
Institute of Electrical and Electronics Engineers
Subject
Citation
item.page.haspartof
Source
2009 IEEE Leos International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
item.page.ispartofseries
item.page.edition
DOI
10.1109/OMEMS.2009.5338540
item.page.datauri
item.page.link
Rights
N/A
Copyrights Note
Rights and licensing
N/A