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Comb- actuated resonant torsional scanner for microdisplays

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dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorArslan, Aslıhan
dc.contributor.kuauthorGökçe, Sertan Kutal
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-10T00:01:04Z
dc.date.issued2009
dc.description.abstractA comb-actuated 1D torsional MEMS scanner is developed for high resolution projection display systems using mechanical coupling principle. 64° TOSA (total optical scan angle) is achieved at 22.1 kHz with 170 V peak-to-peak excitation voltages.
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuTÜBİTAK
dc.identifier.doi10.1109/OMEMS.2009.5338540
dc.identifier.isbn9781-4244-2382-8
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-71749121057
dc.identifier.urihttps://doi.org/10.1109/OMEMS.2009.5338540
dc.identifier.urihttps://hdl.handle.net/20.500.14288/15910
dc.keywordsComb drive
dc.keywordsDisplay
dc.keywordsMechanical coupling
dc.keywordsTorsional scanner Comb drive
dc.keywordsExcitation voltage
dc.keywordsHigh resolution
dc.keywordsMechanical coupling
dc.keywordsMEMS scanner
dc.keywordsMicrodisplays
dc.keywordsProjection displays
dc.keywordsScan angle
dc.keywordsTorsional scanners
dc.keywordsMEMS
dc.keywordsMicroelectromechanical devices
dc.keywordsNanophotonics
dc.keywordsPhotonics
dc.keywordsScanning
dc.language.isoeng
dc.publisherIEEE
dc.relation.ispartof2009 IEEE Leos International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
dc.subjectElectrical electronics engineering
dc.titleComb- actuated resonant torsional scanner for microdisplays
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorÜrey, Hakan
local.contributor.kuauthorGökçe, Sertan Kutal
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorArslan, Aslıhan
local.publication.orgunit1College of Engineering
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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relation.isOrgUnitOfPublication3fc31c89-e803-4eb1-af6b-6258bc42c3d8
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
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relation.isParentOrgUnitOfPublication.latestForDiscovery8e756b23-2d4a-4ce8-b1b3-62c794a8c164

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