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Comb- actuated resonant torsional scanner for microdisplays

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dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuauthorGökçe, Sertan Kutal
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorArslan, Aslıhan
dc.contributor.kuprofileFaculty Member
dc.contributor.kuprofileMaster Student
dc.contributor.kuprofileResearcher
dc.contributor.kuprofileMaster Student
dc.contributor.yokid8579
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.contributor.yokidN/A
dc.date.accessioned2024-11-10T00:01:04Z
dc.date.issued2009
dc.description.abstractA comb-actuated 1D torsional MEMS scanner is developed for high resolution projection display systems using mechanical coupling principle. 64° TOSA (total optical scan angle) is achieved at 22.1 kHz with 170 V peak-to-peak excitation voltages.
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuTÜBİTAK
dc.identifier.doi10.1109/OMEMS.2009.5338540
dc.identifier.isbn9781-4244-2382-8
dc.identifier.linkhttps://www.scopus.com/inward/record.uri?eid=2-s2.0-71749121057anddoi=10.1109%2fOMEMS.2009.5338540andpartnerID=40andmd5=31e6990bfdc63c13c9bc1f4b5f49b2f4
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-71749121057
dc.identifier.urihttp://dx.doi.org/10.1109/OMEMS.2009.5338540
dc.identifier.urihttps://hdl.handle.net/20.500.14288/15910
dc.keywordsComb drive
dc.keywordsDisplay
dc.keywordsMechanical coupling
dc.keywordsTorsional scanner Comb drive
dc.keywordsExcitation voltage
dc.keywordsHigh resolution
dc.keywordsMechanical coupling
dc.keywordsMEMS scanner
dc.keywordsMicrodisplays
dc.keywordsProjection displays
dc.keywordsScan angle
dc.keywordsTorsional scanners
dc.keywordsMEMS
dc.keywordsMicroelectromechanical devices
dc.keywordsNanophotonics
dc.keywordsPhotonics
dc.keywordsScanning
dc.languageEnglish
dc.publisherIEEE
dc.source2009 IEEE Leos International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
dc.subjectElectrical electronics engineering
dc.titleComb- actuated resonant torsional scanner for microdisplays
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authorid0000-0002-2031-7967
local.contributor.authoridN/A
local.contributor.authorid0000-0003-3578-0206
local.contributor.authoridN/A
local.contributor.kuauthorÜrey, Hakan
local.contributor.kuauthorGökçe, Sertan Kutal
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorArslan, Aslıhan
local.publication.orgunit1College of Engineering
local.publication.orgunit1Graduate School of Sciences and Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0

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