Publication:
Comb- actuated resonant torsional scanner for microdisplays

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dc.conference.dateAUG 17-20, 2009
dc.conference.locationClearwater Beach, Florida, USA
dc.conference.organizer2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics (OPTMEMS 2009)
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentOptical Microsystems Laboratory (MEMS)
dc.contributor.facultymemberYes
dc.contributor.kuauthorArslan, Aslıhan
dc.contributor.kuauthorGökçe, Sertan Kutal
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteLaboratory
dc.date.accessioned2024-11-10T00:01:04Z
dc.date.issued2009
dc.description.abstractA comb-actuated 1D torsional MEMS scanner is developed for high resolution projection display systems using mechanical coupling principle. 64° TOSA (total optical scan angle) is achieved at 22.1 kHz with 170 V peak-to-peak excitation voltages.
dc.description.fulltextNo
dc.description.harvestedfromManual
dc.description.indexedbyScopus
dc.description.openaccessYES
dc.description.peerreviewstatusN/A
dc.description.publisherscopeInternational
dc.description.readpublishN/A
dc.description.sponsoredbyTubitakEuTÜBİTAK
dc.description.sponsorshipWe’d like to thank Microvision Inc. and TÜBİTAK grant 106E068 for partly sponsoring this research, and EPFL, Lausanne clean room staff for help with microfabrication
dc.description.studentonlypublicationNo
dc.description.studentpublicationYes
dc.description.versionN/A
dc.identifier.WoSQuartileN/A
dc.identifier.doi10.1109/OMEMS.2009.5338540
dc.identifier.embargoN/A
dc.identifier.grantno106E068
dc.identifier.isbn9781424423828
dc.identifier.scopus2-s2.0-71749121057
dc.identifier.urihttps://doi.org/10.1109/OMEMS.2009.5338540
dc.identifier.urihttps://hdl.handle.net/20.500.14288/15910
dc.keywordsComb drive
dc.keywordsDisplay
dc.keywordsMechanical coupling
dc.keywordsTorsional scanner Comb drive
dc.keywordsExcitation voltage
dc.keywordsHigh resolution
dc.keywordsMechanical coupling
dc.keywordsMEMS scanner
dc.keywordsMicrodisplays
dc.keywordsProjection displays
dc.keywordsScan angle
dc.keywordsTorsional scanners
dc.keywordsMEMS
dc.keywordsMicroelectromechanical devices
dc.keywordsNanophotonics
dc.keywordsPhotonics
dc.keywordsScanning
dc.language.isoeng
dc.publisherInstitute of Electrical and Electronics Engineers
dc.relation.affiliationKoç University
dc.relation.collectionKoç University Institutional Repository
dc.relation.ispartof2009 IEEE Leos International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
dc.relation.openaccessN/A
dc.rightsN/A
dc.subjectElectrical electronics engineering
dc.subjectPhysics
dc.subjectOptics
dc.titleComb- actuated resonant torsional scanner for microdisplays
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorÜrey, Hakan
local.contributor.kuauthorGökçe, Sertan Kutal
local.contributor.kuauthorHolmstrom, Sven
local.contributor.kuauthorArslan, Aslıhan
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