Publication:
Thermal-mechanical detector array with integrated diffraction grating

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dc.conference.dateOCT 21-25, 2007
dc.conference.locationLake Buena Vista, Florida, USA
dc.conference.organizer20th Annual Meeting of the IEEE-Lasers-and-Electro-Optics-Society
dc.conference.organizer2007 IEEE LEOS Annual Meeting Conference Proceedings, Vols. 1 and 2
dc.contributor.coauthorUnal, G.
dc.contributor.coauthorKalyoncu, H.
dc.contributor.coauthorKabuli, G.
dc.contributor.coauthorCaliskan, A. U.
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.facultymemberYes
dc.contributor.kuauthorFerhanoğlu, Onur
dc.contributor.kuauthorToy, Muhammed Fatih
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.date.accessioned2024-11-09T23:53:39Z
dc.date.issued2007
dc.description.abstractAn uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures. A diffraction grating is embedded on the pixel membrane for sensing sub-nm mechanical deflections. The first order reflected light was focused on a CCD camera to monitor the entire array. Results show that it is possible to achieve <50mK NETD using a 12 bit CCD camera.
dc.description.fulltextNo
dc.description.harvestedfromManual
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessNO
dc.description.peerreviewstatusN/A
dc.description.publisherscopeInternational
dc.description.readpublishN/A
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipASELSAN Inc The authors would like to thank Prof. Degertekin and Hamdi Torun from Georgia Institute of Technology for providing CMUT devices for preliminary tests This work is partly sponsored by ASELSAN Inc.
dc.description.studentonlypublicationNo
dc.description.studentpublicationYes
dc.description.versionN/A
dc.identifier.WoSQuartileN/A
dc.identifier.embargoN/A
dc.identifier.isbn9781424409242
dc.identifier.issn1092-8081
dc.identifier.scopus2-s2.0-51249110849
dc.identifier.urihttps://hdl.handle.net/20.500.14288/15060
dc.identifier.wos000259345200419
dc.keywordsThermal detector array
dc.keywordsBimaterial structures
dc.keywordsDiffraction grating
dc.language.isoeng
dc.publisherInstitute of Electrical and Electronics Engineers
dc.relation.affiliationKoç University
dc.relation.collectionKoç University Institutional Repository
dc.relation.ispartofIEEE Lasers and Electro-Optics Society (LEOS) Annual Meeting
dc.relation.openaccessN/A
dc.rightsN/A
dc.subjectEngineering
dc.subjectElectrical electronic engineering
dc.subjectNanoscience
dc.subjectNanotechnology
dc.subjectOptics
dc.titleThermal-mechanical detector array with integrated diffraction grating
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorFerhanoğlu, Onur
local.contributor.kuauthorToy, Muhammed Fatih
local.contributor.kuauthorÜrey, Hakan
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