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Thermal-mechanical detector array with integrated diffraction grating

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dc.contributor.coauthorUnal, G.
dc.contributor.coauthorKalyoncu, H.
dc.contributor.coauthorKabuli, G.
dc.contributor.coauthorCaliskan, A. U.
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorFerhanoğlu, Onur
dc.contributor.kuauthorToy, Muhammed Fatih
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T23:53:39Z
dc.date.issued2007
dc.description.abstractAn uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures. A diffraction grating is embedded on the pixel membrane for sensing sub-nm mechanical deflections. The first order reflected light was focused on a CCD camera to monitor the entire array. Results show that it is possible to achieve <50mK NETD using a 12 bit CCD camera.
dc.description.indexedbyWOS
dc.description.indexedbyScopus
dc.description.openaccessNO
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipASELSAN Inc The authors would like to thank Prof. Degertekin and Hamdi Torun from Georgia Institute of Technology for providing CMUT devices for preliminary tests This work is partly sponsored by ASELSAN Inc.
dc.identifier.isbn978-1-4244-0924-2
dc.identifier.issn1092-8081
dc.identifier.scopus2-s2.0-51249110849
dc.identifier.urihttps://hdl.handle.net/20.500.14288/15060
dc.identifier.wos259345200419
dc.language.isoeng
dc.publisherIEEE
dc.relation.ispartof2007 IEEE Leos Annual Meeting Conference Proceedings, Vols 1 and 2
dc.subjectEngineering
dc.subjectElectrical electronic engineering
dc.subjectNanoscience
dc.subjectNanotechnology
dc.subjectOptics
dc.titleThermal-mechanical detector array with integrated diffraction grating
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorFerhanoğlu, Onur
local.contributor.kuauthorToy, Muhammed Fatih
local.contributor.kuauthorÜrey, Hakan
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit1College of Engineering
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
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