Publication:
Thermal-mechanical detector array with integrated diffraction grating

Simple item page
dc.contributor.coauthorUnal, G.
dc.contributor.coauthorKalyoncu, H.
dc.contributor.coauthorKabuli, G.
dc.contributor.coauthorCaliskan, A. U.
dc.contributor.departmentN/A
dc.contributor.departmentN/A
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.kuauthorFerhanoğlu, Onur
dc.contributor.kuauthorToy, Muhammed Fatih
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.kuprofilePhD Student
dc.contributor.kuprofileMaster Student
dc.contributor.kuprofileFaculty Member
dc.contributor.otherDepartment of Electrical and Electronics Engineering
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.schoolcollegeinstituteGraduate School of Sciences and Engineering
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.yokid205198
dc.contributor.yokidN/A
dc.contributor.yokid8579
dc.date.accessioned2024-11-09T23:53:39Z
dc.date.issued2007
dc.description.abstractAn uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures. A diffraction grating is embedded on the pixel membrane for sensing sub-nm mechanical deflections. The first order reflected light was focused on a CCD camera to monitor the entire array. Results show that it is possible to achieve <50mK NETD using a 12 bit CCD camera.
dc.description.indexedbyWoS
dc.description.indexedbyScopus
dc.description.openaccessNO
dc.description.publisherscopeInternational
dc.description.sponsorshipASELSAN Inc The authors would like to thank Prof. Degertekin and Hamdi Torun from Georgia Institute of Technology for providing CMUT devices for preliminary tests This work is partly sponsored by ASELSAN Inc.
dc.identifier.doiN/A
dc.identifier.isbn978-1-4244-0924-2
dc.identifier.issn1092-8081
dc.identifier.scopus2-s2.0-51249110849
dc.identifier.urihttps://hdl.handle.net/20.500.14288/15060
dc.identifier.wos259345200419
dc.languageEnglish
dc.publisherIEEE
dc.source2007 IEEE Leos Annual Meeting Conference Proceedings, Vols 1 and 2
dc.subjectEngineering
dc.subjectElectrical electronic engineering
dc.subjectNanoscience
dc.subjectNanotechnology
dc.subjectOptics
dc.titleThermal-mechanical detector array with integrated diffraction grating
dc.typeConference proceeding
dspace.entity.typePublication
local.contributor.authorid0000-0002-5381-533X
local.contributor.authorid0000-0003-0176-8807
local.contributor.authorid0000-0002-2031-7967
local.contributor.kuauthorFerhanoğlu, Onur
local.contributor.kuauthorToy, Muhammed Fatih
local.contributor.kuauthorÜrey, Hakan
relation.isOrgUnitOfPublication21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0

Files

Collections

Publications without Fulltext