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A high-frequency comb-actuated resonant MEMS scanner for microdisplays

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dc.contributor.coauthorBrown, Dean
dc.contributor.coauthorDavis, Wyatt O.
dc.contributor.departmentDepartment of Electrical and Electronics Engineering
dc.contributor.departmentGraduate School of Sciences and Engineering
dc.contributor.kuauthorGökçe, Sertan Kutal
dc.contributor.kuauthorHolmstrom, Sven
dc.contributor.kuauthorÜrey, Hakan
dc.contributor.schoolcollegeinstituteCollege of Engineering
dc.contributor.schoolcollegeinstituteGRADUATE SCHOOL OF SCIENCES AND ENGINEERING
dc.date.accessioned2024-11-09T23:19:14Z
dc.date.issued2011
dc.description.abstractA high-frequency novel torsional MEMS scanner is developed for high resolution microdisplays employing a multi-frame geometry. For the torsional mirror, 26.7° and 36.1° total-optical-scan-angle are achieved at resonance, at atmospheric pressure and vacuum respectively.
dc.description.indexedbyScopus
dc.description.indexedbyWOS
dc.description.openaccessYES
dc.description.publisherscopeInternational
dc.description.sponsoredbyTubitakEuN/A
dc.description.sponsorshipASELSAN Corp.
dc.identifier.doi10.1109/OMEMS.2011.6031064
dc.identifier.isbn9781-4577-0336-2
dc.identifier.issn2160-5033
dc.identifier.quartileN/A
dc.identifier.scopus2-s2.0-82955239844
dc.identifier.urihttps://doi.org/10.1109/OMEMS.2011.6031064
dc.identifier.urihttps://hdl.handle.net/20.500.14288/10514
dc.identifier.wos297850100014
dc.keywordsComb drive
dc.keywordsdisplay
dc.keywordsMEMS scanner
dc.keywordsTorsional scanner at resonance
dc.keywordsComb drive
dc.keywordsDisplay
dc.keywordsHigh frequency HF
dc.keywordsHigh resolution
dc.keywordsMEMS scanner
dc.keywordsMicrodisplays
dc.keywordsMulti-frame
dc.keywordsTorsional scanners
dc.keywordsAtmospheric pressure
dc.keywordsMOEMS
dc.keywordsNanophotonics
dc.keywordsScanning
dc.language.isoeng
dc.publisherIEEE
dc.relation.ispartofInternational Conference on Optical MEMS and Nanophotonics
dc.subjectElectrical electronics engineering
dc.titleA high-frequency comb-actuated resonant MEMS scanner for microdisplays
dc.typeConference Proceeding
dspace.entity.typePublication
local.contributor.kuauthorÜrey, Hakan
local.contributor.kuauthorGökçe, Sertan Kutal
local.contributor.kuauthorHolmstrom, Sven
local.publication.orgunit1College of Engineering
local.publication.orgunit1GRADUATE SCHOOL OF SCIENCES AND ENGINEERING
local.publication.orgunit2Department of Electrical and Electronics Engineering
local.publication.orgunit2Graduate School of Sciences and Engineering
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relation.isOrgUnitOfPublication.latestForDiscovery21598063-a7c5-420d-91ba-0cc9b2db0ea0
relation.isParentOrgUnitOfPublication8e756b23-2d4a-4ce8-b1b3-62c794a8c164
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relation.isParentOrgUnitOfPublication.latestForDiscovery8e756b23-2d4a-4ce8-b1b3-62c794a8c164

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