Publication: A high-frequency comb-actuated resonant MEMS scanner for microdisplays
Program
KU Authors
Co-Authors
Brown, Dean
Davis, Wyatt O.
Advisor
Publication Date
2011
Language
English
Type
Conference proceeding
Journal Title
Journal ISSN
Volume Title
Abstract
A high-frequency novel torsional MEMS scanner is developed for high resolution microdisplays employing a multi-frame geometry. For the torsional mirror, 26.7° and 36.1° total-optical-scan-angle are achieved at resonance, at atmospheric pressure and vacuum respectively.
Description
Source:
International Conference on Optical MEMS and Nanophotonics
Publisher:
IEEE
Keywords:
Subject
Electrical electronics engineering