Publication:
A high-frequency comb-actuated resonant MEMS scanner for microdisplays

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Brown, Dean
Davis, Wyatt O.

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Abstract

A high-frequency novel torsional MEMS scanner is developed for high resolution microdisplays employing a multi-frame geometry. For the torsional mirror, 26.7° and 36.1° total-optical-scan-angle are achieved at resonance, at atmospheric pressure and vacuum respectively.

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IEEE

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Electrical electronics engineering

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International Conference on Optical MEMS and Nanophotonics

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DOI

10.1109/OMEMS.2011.6031064

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