Publication: A high-frequency comb-actuated resonant MEMS scanner for microdisplays
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KU Authors
Co-Authors
Brown, Dean
Davis, Wyatt O.
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N/A
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Abstract
A high-frequency novel torsional MEMS scanner is developed for high resolution microdisplays employing a multi-frame geometry. For the torsional mirror, 26.7° and 36.1° total-optical-scan-angle are achieved at resonance, at atmospheric pressure and vacuum respectively.
Source
Publisher
IEEE
Subject
Electrical electronics engineering
Citation
Has Part
Source
International Conference on Optical MEMS and Nanophotonics
Book Series Title
Edition
DOI
10.1109/OMEMS.2011.6031064
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