Publication: MEMS laser scanners: a review
Program
KU-Authors
KU Authors
Co-Authors
Baran, Utku
Advisor
Publication Date
2014
Language
English
Type
Review
Journal Title
Journal ISSN
Volume Title
Abstract
Laser scanners have been an integral part of MEMS research for more than three decades. During the last decade, miniaturized projection displays and various medical-imaging applications became the main driver for progress in MEMS laser scanners. Portable and truly miniaturized projectors became possible with the availability of red, green, and blue diode lasers during the past few years. Inherent traits of the laser scanning technology, such as the very large color gamut, scalability to higher resolutions within the same footprint, and capability of producing an always-in-focus image render it a very viable competitor in mobile projection. Here, we review the requirements on MEMS laser scanners for the demanding display applications, performance levels of the best scanners in the published literature, and the advantages and disadvantages of electrostatic, electromagnetic, piezoelectric, and mechanically coupled actuation principles. Resonant high-frequency scanners, low-frequency linear scanners, and 2-D scanners are included in this review.
Description
Source:
Journal Of Microelectromechanical Systems
Publisher:
Ieee-Inst Electrical Electronics Engineers Inc
Keywords:
Subject
Electrical electronics engineering, Nanoscience, Nanotechnology, Physics, Physical instruments